Charged particle beam apparatus, specimen observation system and operation program

ABSTRACT

For a novice user to easily recognize a difference between imaging results caused by a difference between observation conditions, a computer has an operation screen display observation target setting buttons for changing an observation condition for a specimen including a combination of parameter setting values of a charged particle beam apparatus. The processing unit has the operation screen display a radar chart including a characteristic, indicated by three or more incompatible items, of an observation condition for each of the observation target setting buttons. The radar chart indicates at least items of high resolution, emphasis on surface structure and emphasis on material difference.

TECHNICAL FIELD

The present invention relates to techniques of a charged particle beamapparatus, a specimen observation system and an operation program.

BACKGROUND ART

Setting of a combination of parameter setting values (hereinafterreferred to as an observation condition) which are setting values ofparameters in operation of a scanning electron microscope (hereinafterreferred to as the electron microscope) largely relies on experience.For this reason, when a novice user operating the electron microscope,the user has difficulty in knowing what kind of influence the electronmicroscope observation condition has on a captured image. As a result,there is a problem that the novice user has a hard time improvinghis/her skills.

To counter such a problem, in techniques described in Patent Documents 1and 2, capturings are performed under two or more combinations of simpleobservation conditions prior to main capturing. Then, two or more simpleobservation images thus obtained are displayed in a list form on adisplay unit (e preview). Subsequently, a user selects a desired simpleobservation image from the displayed simple observation images. Then, acomputer sets the observation condition for the selected simpleobservation image. Thereafter, the user makes necessary manualadjustment on the selected simple observation image, and then capturingis performed. An image obtained as a result of the capturing isdisplayed on the display unit.

PRIOR ART DOCUMENT Patent Document

Patent Document 1: Japanese Patent No. 4014916

Patent Document 2: Japanese Patent No. 4014917

SUMMARY OF THE INVENTION Problem to be Solved by the Invention

However, the techniques described in Patent Documents 1 and 2 have thefollowing problems.

-   (1) The novice user cannot recognize which image among the two or    more simple observation images is good.-   (2) Since the simple observation images are raw captured images, it    is difficult for the novice user to see how the two or more simple    observation images are different from each other.-   (3) It takes time to obtain the two or more simple observation    images. In other words, efficiency to obtain a target image is poor.

The present invention was made in consideration of the backgrounddescribed above. It is an object of the present invention to enable evena novice user to easily recognize a difference between imaging resultscaused by a difference between observation conditions.

Means for Solving the Problem

In order to solve the above problem, the present invention includes aprocessing unit configured to have an image display unit in an imagedisplay device display observation target setting buttons for changingan observation condition for a specimen, the observation conditioncomprising a combination of parameter setting values of the chargedparticle beam apparatus. The processing unit has the image display unitdisplay an observation condition characteristic indicator includingcharacteristics, indicated by three or more incompatible items, of anobservation condition for each of the observation target settingbuttons. Alternatively, the processing unit has the image display unitdisplay an observation condition characteristic indicator including atleast items of high resolution, emphasis on surface structure andemphasis on material difference which are indicated as a characteristicof an observation condition for each of the observation target settingbuttons.

Alternatively, the present invention includes a processing unitconfigured to have an image display unit in an image display devicedisplay observation target setting buttons for changing an observationcondition for a specimen, the observation condition including acombination of parameter setting values of the charged particle beamapparatus. The processing unit has a highlighted image displayed on ornear each of the observation target setting buttons, the highlightedimage being highlighted on an image change due to a change of theobservation condition.

The other means for solving the problems are described later.

Effects of the Invention

The present invention makes it possible to easily recognize a differencebetween imaging results caused by a difference between observationconditions.

BRIEF DESCRIPTION OF THE DRAWINGS

FIG. 1 is a schematic configuration diagram showing an example of anelectron microscope according to the present invention.

FIG. 2 is a flowchart showing operation procedures of the electronmicroscope according to an embodiment of the present invention.

FIG. 3 is a diagram showing a screen example of an operation screenaccording to the embodiment.

FIG. 4 is a diagram (Part 1) showing an example of the operation screenduring start-up.

FIG. 5 is a diagram (Part 2) showing an example of the operation screenduring start-up.

FIG. 6 is a diagram showing an example of the operation screen whenirradiation of a primary electron beam onto a specimen is started.

FIG. 7 is a diagram (Part 1) showing an example of the operation screenduring visual field search and magnification adjustment by a user.

FIG. 8 is a diagram (Part 2) showing an example of the operation screenduring visual field search and magnification adjustment by the user.

FIG. 9 is a diagram (Part 1) showing an example of the operation screenduring image saving (capturing).

FIG. 10 is a diagram (Part 2) showing an example of the operation screenduring image saving (capturing).

FIG. 11 is a diagram (Part 3) showing an example of the operation screenduring image saving (capturing).

FIG. 12 is a diagram (Part 4) showing an example of the operation screenduring image saving (capturing).

FIG. 13 is a diagram (Part 5) showing an example of the operation screenduring image saving (capturing).

FIG. 14 is a diagram (Part 6) showing an example of the operation screenduring image saving (capturing).

FIG. 15 is a diagram (Part 1) showing an example of the operation screenduring image confirmation and adjustment and changing of observationconditions by the user.

FIG. 16 is a diagram (Part 2) showing an example of the operation screenduring image confirmation and adjustment and changing of observationconditions by the user.

FIG. 17 is a diagram (Part 3) showing an example of the operation screenduring image confirmation and adjustment and changing of observationconditions by the user.

FIG. 18 is a diagram showing an observation condition setting tableaccording to the embodiment.

FIG. 19 is a diagram (Part 4) showing an example of the operation screenduring image confirmation and adjustment and changing of observationconditions by the user.

FIG. 20 is a diagram (Part 5) showing an example of the operation screenduring image confirmation and adjustment and changing of observationconditions by the user.

FIG. 21 is a diagram (Part 6) showing an example of the operation screenduring image confirmation and adjustment and changing of observationconditions by the user.

FIG. 22 is a diagram (Part 7) showing an example of the operation screenduring image confirmation and adjustment and changing of observationconditions by the user.

FIG. 23 is a diagram showing an operation screen during image re-saving(capturing) by the user.

FIG. 24 is a diagram (Part 1) showing an example of the operation screenduring image reconfirmation and readjustment and re-changing ofobservation conditions by the user.

FIG. 25 is a diagram (Part 2) showing an example of the operation screenduring image reconfirmation and readjustment and re-changing ofobservation conditions by the user.

FIG. 26 is a diagram (Part 3) showing an example of the operation screenduring image reconfirmation and readjustment and re-changing ofobservation conditions by the user.

FIG. 27 is a diagram (Part 4) showing an example of the operation screenduring image reconfirmation and readjustment and re-changing ofobservation conditions by the user.

FIG. 28 is a diagram (Part 5) showing an example of the operation screenduring image reconfirmation and readjustment and re-changing ofobservation conditions by the user.

FIG. 29 is a diagram (Part 6) showing an example of the operation screenduring image reconfirmation and readjustment and re-changing ofobservation conditions by the user.

FIG. 30 is a diagram (Part 7) showing an example of the operation screenduring image reconfirmation and readjustment and re-changing ofobservation conditions by the user.

FIG. 31 is a diagram (Part 8) showing an example of the operation screenduring image reconfirmation and readjustment and re-changing ofobservation conditions by the user.

FIG. 32 is a diagram (Part 9) showing an example of the operation screenduring image reconfirmation and readjustment and re-changing ofobservation conditions by the user.

FIG. 33 is a diagram (Part 10) showing an example of the operationscreen during image reconfirmation and readjustment and re-changing ofobservation conditions by the user.

FIG. 34 is a diagram (Part 11) showing an example of the operationscreen during image reconfirmation and readjustment and re-changing ofobservation conditions by the user.

FIG. 35 is a diagram showing an operation screen during image re-saving(capturing) by the user.

FIG. 36 is a diagram (Part 12) showing an example of the operationscreen during image reconfirmation and readjustment and re-changing ofobservation conditions by the user.

FIG. 37 shows a modified example of an application assist screenaccording to the embodiment.

MODES FOR CARRYING OUT THE INVENTION

Next, a mode for carrying out the present invention (hereinafterreferred to as the “embodiment”) is described in detail with referenceto the appropriate drawings. Note that, in the drawings, the sameconstituent components are denoted by the same reference numerals, anddescription thereof is omitted.

Note that the embodiment discloses a charged particle beam apparatusincluding a processing unit configured to display, on an image displayunit in an image display device, observation target setting buttons forchanging an observation condition for a specimen which includes acombination of parameter setting values of the charged particle beamapparatus. The processing unit is configured for displaying ahighlighted image, in which an image change due to a change of theobservation condition is highlighted, on or near each of the observationtarget setting buttons.

The embodiment also discloses that respective one of the observationtarget setting buttons and corresponding one of observation conditionsare associated with each other and stored in a storage unit, and that,when one of the observation target setting buttons is selected with aninput unit, the processing unit sets parameter setting values of thecharged particle beam apparatus under an observation condition for theselected one of the observation target setting buttons.

Also, the embodiment discloses the following. Specifically, theprocessing unit acquires an image of a specimen under a presetobservation condition, and has the observation target setting buttonsdisplayed on the image display unit based on image quality of theacquired image and a current observation condition. Then, when theobservation condition are changed with the input unit, the processingunit repeats processing of reacquiring an image under a changedobservation condition, and displaying the observation target settingbuttons on the image display unit based on image quality of thereacquired image and the current observation condition until aninstruction to terminate the processing is inputted with the input unit.

Moreover, the embodiment discloses that the processing unit isconfigured to display information about confirmation of presence orabsence of coating on the specimen or about pretreatment of thespecimen, prior to acquisition of a first image of the specimen.

Furthermore, the embodiment discloses that during processing standbytime, the processing unit is configured to display a learning screenrepresenting at least one of a structure of an electron microscopestructure, an operation procedure of the electron microscope andexplanation of an operation item on the operation screen.

The embodiment discloses that the processing unit is configured todisplay, on the image display unit, an operation screen displayingoperation items of the charged particle beam apparatus, and to hide ordeactivate a predetermined operation item displayed on the operationscreen. The embodiment also discloses that the predetermined operationitem includes at least one of focus adjustment, X focus adjustment and Yfocus adjustment.

Moreover, the embodiment discloses that the processing unit limitsfunctions of the charged particle beam apparatus according to theobservation condition. Furthermore, the embodiment discloses that theprocessing unit limits the functions of the charged particle beamapparatus according to the observation condition by having image shiftoperable and stage movement inoperable when a magnification is not lessthan a predetermined value and by the stage movement operable and theimage shift inoperable when the magnification is less than thepredetermined value.

Also, the embodiment discloses that the processing unit is configured tohide a predetermined observation target setting button based on anoperation history.

Moreover, the embodiment discloses that the processing unit isconfigured to display, on the image display unit, an operation screenrepresenting an operation item of the charged particle beam apparatusand display information indicating a current operation step on theoperation screen; and the information indicating the current operationstep includes a main item indicating a main operation step and asub-item indicating a sub operation step.

Furthermore, the embodiment discloses that the processing unit isconfigured to display, on the image display unit, an operation screenrepresenting an operation item of the charged particle beam apparatus,display the acquired image on the operation screen, and display, nearthe image displayed on the image display unit, at least one of amagnification adjustment slider, a focus adjustment slider, a focus Xadjustment slider and a focus Y adjustment slider.

The embodiment discloses a charged particle beam apparatus including aprocessing unit configured to display, on an image display unit in animage display device, observation target setting buttons for changing anobservation condition for a specimen, which includes a combination ofparameter setting values of the charged particle beam apparatus. Theprocessing unit is configured to display, on the image display unit,observation condition characteristic indicator in which a characteristicof an observation condition for each of the observation target settingbuttons are indicated by three or more incompatible items.

Also, the embodiment discloses that items in the observation conditioncharacteristic indicator include high resolution., emphasis on surfacestructure and emphasis on material difference.

The embodiment discloses a charged particle beam apparatus including aprocessing unit configured to display, on an image display unit in animage display device, observation target setting buttons for changing anobservation condition for a specimen which includes a combination ofparameter setting values of the charged particle beam apparatus. Theprocessing unit is configured to display, on the image display unit,observation condition characteristic indicator in which at least itemsof high resolution, emphasis on surface structure and emphasis onmaterial difference are indicated as a characteristic of observationconditions for each of the observation target setting buttons.

Also, the embodiment discloses that the items in the observationcondition characteristic indicator include items of charge-upsuppression and/or beam damage suppression.

The embodiment discloses that the apparatus includes, as the pluralityof observation target setting buttons, a first button configured tochange an observation condition to an observation condition forobserving with the highest resolution, a second button configured tochange an observation condition to an observation condition having themost emphasis placed on a surface structure, and a third buttonconfigured to change an observation condition to an observationcondition having the most emphasis placed on the material difference.Also, the embodiment discloses that the apparatus further includes, asthe observation target setting buttons, a fourth button configured tochange an observation condition to an observation condition havingemphasis placed on the surface structure and a material difference and afifth button configured to change an observation condition to anobservation condition that is most suitable for elemental analysis.

Moreover, the embodiment discloses that the observation conditioncharacteristic indicator includes a radar chart.

Furthermore, the embodiment discloses that the processing unit isconfigured to display, on the image display unit, a highlighted imagehighlighted on a characteristic of an image obtained under anobservation condition for each of the observation target settingbuttons. The embodiment also discloses that the highlighted image servesas an image which schematically represents three or more materialsdifferent in shape and/or material quality.

The embodiment discloses that, after acquiring an image of a newspecimen under a standard observation condition, the processing unitchanges the observation condition according to each of the observationtarget setting buttons. The embodiment also discloses that the standardobservation condition serves as an observation condition for observingwith the highest resolution.

The embodiment discloses a specimen observation system including acharged particle beam apparatus and a computer configured to control thecharged particle beam apparatus, the computer including a processingunit configured to display, on an image display unit in an image displaydevice, observation target setting buttons for changing a observationcondition for a specimen which includes a combination of parametersetting values of the charged particle beam apparatus. The processingunit is configured to display a highlighted image, in which an imagechange due to a change of the observation condition is highlighted, onor near each of the observation target setting buttons.

Moreover, the embodiment discloses an operation program for operating acharged particle beam apparatus, wherein when the operation program isexecuted by a computer for displaying, on an image display unit in animage display device, observation target setting buttons for changing anobservation condition which includes a combination of parameter settingvalues of the charged particle beam apparatus, the operation program isexecuted by a computer for displaying a highlighted image, in which animage change due to a change of the observation condition ishighlighted, on or near an observation target setting button.

<Configuration of Electron Microscope>

FIG. 1 is a schematic configuration diagram showing an example of anelectron microscope according to the present invention.

In an electron microscope (charged particle beam apparatus and specimenobservation system) 101, a primary electron beam 2 emitted from anelectron gun 1 is converged by a condenser lens 3 and an objective lens8, and then irradiated onto a specimen 9 by an upper deflector 6 and alower deflector 7. Signal electrons generated from the specimen 9 aredetected by a detector 10 and processed by a computer (processing unit)19 through circuits 11 to 17 to be described later. A signal recorded soas to correspond to a scanning position is displayed on an image displaydevice 18. In order to focus the primary electron beam 2 as dots on thespecimen 9, an X-direction stigmator 4 for focus X adjustment and aY-direction stigmator 5 for focus Y adjustment are provided. Byadjusting control conditions thereof, the focus X adjustment and focus Yadjustment (astigmatism correction) can be performed. Moreover, byadjusting excitation intensity of the condenser lens 3 or the objectivelens 8, focus adjustment can be performed on the specimen 9. Theelectron optical system described above is housed in an electronmicroscope column (charged particle beam apparatus) 100.

Moreover, a high-voltage control circuit 11, a condenser lens controlcircuit 12, an X-direction stigmator control circuit 13, a Y-directionstigmator control circuit 14, a deflector control circuit 15, anobjective lens control circuit 16 and a detection signal control circuit17 are controlled by the computer 19 such as a CPU (Central ProcessingUnit). The respective control circuits 11 to 17 may be providedseparately or on one substrate, or may be included in the computer 19.The image display device 18, a storage device (storage unit) 21 and amemory 22 are connected to the computer 19. As described later, a useradjusts focus conditions of the objective lens 8 and astigmatismcorrection conditions of the X-direction stigmator 4 and the Y-directionstigmator 5 through an operation screen 200 (FIGS. 3 to 37) displayed onthe image display device 18. The operation screen 200 in this embodimentis previously stored in the storage device 21 so as to correspond tooperation steps and the like as described later. Alternatively, if thecomputer 19 is connected to an unillustrated network, the operationscreen 200 may be stored in another storage device connected to thenetwork.

An operation program 31 is developed in the memory 22, and the operationprogram 31 is executed by the computer 19. The operation program 31 isconfigured to display the operation screen 200 on the image displaydevice 18, and to control each of the components 1 to 17 based oninformation inputted through an input device 23.

Note that, as described in detail later, the operation screen 200 iseach of screens to be displayed corresponding to user operation steps.

<Operation Procedures>

FIG. 2 is a flowchart showing operation procedures of the electronmicroscope according to this embodiment. With appropriate reference toFIG. 1, description is given of the operation procedures according tothis embodiment along FIG. 2.

First, the user activates the operation screen 200 (FIGS. 3 to 37) byrunning an unillustrated operation program (S101). Note that thespecimen 9 may be set before or after the activation of the operationscreen 200.

Then, the computer 19 is implemented to scan the specimen 9 under adefault observation condition to acquire a scan image (hereinafterreferred to as the image) (S102). The operation program 31 is executedto display the acquired image on the image display device 18. Here, theobservation condition is the combination of parameter setting values ofan electron microscope 101.

Subsequently, the user performs visual field search, magnificationadjustment and the like on the acquired image (S103). Note that, whenthe visual field and the magnification are automatically set, theprocessing of Step S103 can be omitted.

The computer 19 is implemented to scan the specimen 9 as needed with thevisual field and magnification set in Step S103 to acquire an image, andto display the image on the image display device 18.

Then, the user instructs the computer 19 to store the image displayed onthe image display device 18 in the storage device 21 (S104). In thisembodiment, the storage of the image in the storage device 21 isreferred to as “capturing” as necessary.

Thereafter, the user determines whether or not the acquired image is OK(S105).

If the image is OK as a result of Step S105 (S105: Yes), the userterminates the processing.

If the image is not OK as a result of Step S105 (S105: No), i.e., NG,the user adjusts or changes the observation condition by reference to amessage and the like displayed on an application assist screen 202 (FIG.3) or the like on the operation screen 200 (S106).

The computer 19 is implemented to scan the specimen 9 as needed underthe adjusted or changed observation condition to acquire an image, andto display the image on the image display device 18.

Then, the operation program 31 returns the processing to Step S103, andthe user instructs the computer 19 to store (capture) the image, whichis displayed on the image display device 18, again in the storage device21.

Thereafter, the electron microscope 101 repeats the processing from StepS103 to Step S106.

<Configuration of Operation Screen>

FIG. 3 is a diagram showing a screen example of an operation screenaccording to this embodiment.

The operation screen 200 includes an operation navigation screen 201,the application assist screen 202, an image display screen (imagedisplay unit) 203 and an operation panel screen 204. The individualscreens 201 to 204 are described later.

The operation navigation screen 201 is a screen showing operation steps.On the operation navigation screen 201, a main item (reference numeralA1) as the current operation step and a sub-item (reference numeral A2)of the main item are displayed. In this way, even a novice user caneasily follow the operation steps.

The application assist screen 202 is a screen displaying advice onchanging or adjustment of capturing conditions.

The image display screen 203 is a screen displaying an image (scanimage) obtained by the electron microscope 101.

The operation panel screen 204 is a screen for changing or adjusting thecapturing conditions.

Note that the contents displayed on the screens 201 to 204 change withthe step of the operation performed by the user as described later.

The operation screen 200 according to this embodiment is based on theassumption that the user is a novice user.

<Operation Screen at Each Operation Step>

Next, with reference to FIGS. 4 to 37, description is given of thecontents displayed on the operation screen 200 at each operation step.Note that, as to the elements included in the screens 201 to 204 in thefollowing drawings, only the necessary elements in the screen to bedescribed are denoted by reference numerals, and reference numerals ofthe others are omitted. Also, although the reference numerals areassigned in most of FIGS. 4 to 37, description of the operation screen200 and the screens 201 to 204 is omitted in the drawings.

Moreover, FIG. 1 is referred to as needed, and the same step numbers asthose in FIG. 2 are used.

(S101)

First, FIGS. 4 and 5 show examples of the operation screen during thestart-up of scan screen (S101).

FIG. 4 is a diagram showing contents displayed when the operation screenis activated.

Since no capturing of the specimen 9 is performed when the operationscreen 200 is activated, the application assist screen 202 (FIG. 3) isnot displayed. Also, no information is displayed on the image displayscreen 203 and the operation panel screen 204.

The operation navigation screen 201 shows that the current operationstep is “Confirm Whether to Set Specimen” of “1. Preparation”, anddisplays buttons A11 to A13 to confirm whether to set the specimen 9.

Here, it is assumed that the specimen 9 is already set on the electronmicroscope 101 and the user presses the button A13 “Start Observation onSet Specimen”.

FIG. 5 is a diagram showing an example of the operation screen duringthe start-up.

At the step shown in FIG. 5, the operation navigation screen 201 showsthat the current operation step is “Start (irradiation start)” of “1.Preparation”.

A start button D1 is highlighted on the operation panel screen 204. Whenthe user presses the start button D1, the electron microscope 101performs capturing by irradiating an electron beam onto the specimen 9under a preset default observation condition. Such highlighting ofbuttons and the like to be operated next enables the user to learn theobservation procedure.

Moreover, such highlighting of buttons to be pressed next enables even anovice user to easily proceed with the operation.

In this embodiment, “Observation Target=Standard Observation, DepositedSpecimen (High Vacuum)” is set as the default observation condition.

In this embodiment, a first image is acquired under the defaultobservation condition, and parameter adjustment is performed byprocessing to be described later based on the acquired image. Usually,the novice user does not know how to set parameters of the electronmicroscope. However, according to this embodiment, the user is notrequired to perform complicated parameter setting or selection ofobservation condition from the start. As a result, even the novice usercan easily proceed with the observation.

As the default observation condition, an average observation conditionmay be set or an observation condition that clarifies characteristics tobe highlighted may be set. Since it is known that the capturing isperformed under the default observation condition, the processing up toimage acquisition may be automatically performed after the specimen 9 isset by the user. However, by allowing the user to press the start buttonD1 and the like, the user can learn the procedure.

Note that, when a change button D2 displayed on the operation panelscreen 204 is pressed, an observation condition change screen (e.g., anobservation target change screen 304 to be described later withreference to FIG. 17) is displayed to enable change in observationtarget (see FIG. 17 for change in observation target). Although the usercan set the magnification, visual field and the like at the operationstep shown in FIG. 5, description thereof is omitted here. Note that theoperation panel screen 204 is a screen that changes with the operationnavigation screen 201.

Note that, at a predetermined step, the operation program 31 may beconfigured to display, on the application assist screen 202, informationabout confirmation of the presence or absence of coating on the specimen9. Also, the operation program 31 may be configured to display, on theapplication assist screen 202, information about pretreatment on thespecimen 9, such as information about deposition on the specimen 9 andinformation about a method of observing an uncoated specimen 9 (morespecifically, an operation procedure to select a degree of vacuum forshifting to low-vacuum observation) and a degree of vacuum (target andmethod of high-vacuum observation and low-vacuum observation).

In this way, the user can confirm the presence or absence of coating andacquire knowledge about the pretreatment of the specimen.

Note that, in this embodiment, the information about the confirmation ofthe presence or absence of coating and the pretreatment is displayedbefore irradiation of the primary electron beam 2. However, the presentinvention is not limited thereto, but such information may be displayedat another operation step.

(S102)

Next, FIG. 6 is a diagram showing an example of the operation screenwhen irradiation of the primary electron beam onto the specimen isstarted (S102: image acquisition).

When the irradiation of the primary electron beam 2 onto the specimen 9is started by the user pressing the start button D1 shown in FIG. 5, theoperation screen 200 becomes inactive as shown in FIG. 6, and anirradiation status screen 301 is displayed.

The irradiation status screen 301 includes a schematic diagram screen E1showing the current irradiation status in a schematic diagram, aprogress screen E2 showing the current irradiation progress, anobservation condition screen E3 showing the current observationcondition, a cancel button E4 and the like.

Here, for the user's learning, a learning screen may be displayedinstead of the irradiation status screen 301, the learning screenshowing the principles of the electron microscope 101, explanation ofthe pretreatment of the specimen 9, the structure of the electronmicroscope 101, the operation procedure of the electron microscope 101,the principles of highlighted images in capturing, and the like.

Alternatively, a learning screen may be displayed instead of theirradiation status screen 301, the learning screen showing explanationof items in the screens 201 to 204 (FIG. 3) such as the applicationassist screen 202 (FIG. 3) in the operation screen 200, explanation ofvarious adjustment parameters of the electron microscope 101, and thelike.

Particularly, the application assist screen 202 is to be displayedfrequently on the operation screen 200 in the subsequent process.Therefore, by displaying the learning screen on the application assistscreen 202, the user can be expected to improve his/her knowledge on asubconscious level.

Note that such a learning screen may be displayed together with theirradiation status screen 301.

Even if the user does not pay close attention to such a learning screen,a learning effect on the user can be expected by repeatedly displayingthe learning screen even for a short period of time during theirradiation of the primary electron beam 2. Alternatively, the operationprogram 31 may be configured to repeatedly display the learning screenon the image display device 18 not only during autofocus adjustment tobe described later but also during user standby time (processing standbytime). Here, the user standby time is the time generated while variousadjustments are being automatically made by the electron microscope 101.Thus, further improvement in the learning effect on the user can beexpected. Alternatively, the operation program 31 may be configured todisplay the learning screen on the image display device 18 in the userstandby time during vacuuming of a specimen chamber. The vacuuming ofthe specimen chamber is the longest as the user standby time. Therefore,by displaying the learning screen during the vacuuming, improvement inthe learning effect on the user can be expected.

The learning screen as described above is different from an ATM(Automated Teller Machine) or an advertisement displayed on an Internetwebsite in that explanation of an operation method to be performed nextor the concept of the electron microscope 101 can be visualized forintuitive understanding. This embodiment is different from the ATM orthe advertisement displayed on the Internet website in that the user canacquire the knowledge about the principles of the electron microscope101 and the operation method by visualizing the explanation of theoperation method to be performed next or the concept of the electronmicroscope 101 for intuitive understanding as described above.

(S103)

Next, FIGS. 7 and 8 are diagrams each showing an example of theoperation screen during visual field search and magnification adjustmentby the user (S103).

FIG. 7 is a diagram showing contents displayed immediately after theirradiation of the primary electron beam is completed.

Here, the user performs magnification adjustment and visual field searchon an image acquired after the completion of the irradiation of theprimary electron beam 2.

The operation navigation screen 201 shows that the current operationstep is “Magnification Adjustment/Visual Field Search” of “2. VisualField Search”.

Also, an image C41 acquired as a result of the irradiation of theprimary electron beam 2 is displayed on the image display screen 203.

Moreover, various buttons for adjustment of the electron microscope 101are displayed on the operation panel screen 204.

For example, if the user wishes to increase the magnification, he/shecan manually adjust the magnification by moving a slider C42 attached onthe side of the image C41. For example, the user may move the slider C42when he/she wishes to make a large change in magnification, and operatea wheel or trackball of a mouse when he/she makes a fine change inmagnification. The computer 19 changes the magnification by causing theobjective lens control circuit 16 to control the objective lens 8according to a movement distance of the slider C42 inputted through theinput device 23.

Meanwhile, when the user wishes to move the visual field of the imageC41, he/she can manually move the visual field of the image C41 bydragging the image C41, for example. Based on information inputtedthrough the input device 23, the computer 19 may move a stage or performan image shift by causing the deflector control circuit 15 to controlthe upper deflector 6 and the lower deflector 7 to deflect the primaryelectron beam 2.

Here, as to the movement of the visual field, the image shift may beadopted as the means for moving the visual field if the magnification isnot less than a predetermined magnification, while the stage movementmay be adopted as the means for moving the visual field if themagnification is not more than the predetermined magnification. In otherwords, the computer 19 may enable the image shift and disable the stagemovement if the magnification is not less than a predetermined value. Onthe other hand, if the magnification is less than the predeterminedvalue, the computer 19 may limit the functions of the electronmicroscope 101 by enabling the stage movement and disabling the imageshift. Accordingly, the user can be prevented from erroneously movingthe visual field.

As described above, in this embodiment, the items of parameteradjustment, such as the magnification and focus to be described later,and the slider C42 are displayed near the image C41 (next to the imageC41 in this embodiment). Thus, the movement of the visual field or mousecursor can be minimized, and thus fine adjustment can be made whilecomparing with the image C41. In the conventional technique, a tab on anoperation device mounted in the electron microscope 101 is operated. Onthe other hand, in this embodiment, the magnification and the like areadjusted using the slider C42 and the like displayed near the image C41.Thus, the adjustment can be easily made while watching the image C41.Also, when a plurality of images C41 are displayed, the slider C42 isdisplayed for each of the images C41. Thus, the user can easily makeadjustments for each of the images C41.

Note that, in this event, the operation program 31 may be configured tolimit the range of the magnification that can be adjusted. In otherwords, the operation program 31 may be configured to prevent the userfrom setting the magnification to more than a predeterminedmagnification. Accordingly, the user can be prevented from erroneouslysetting an unexpected magnification and causing a problem in an image tobe acquired.

Note that a display mode for the image C41 displayed on the imagedisplay screen 203 is appropriately switched by the operation program 31according to the operation step. For example, at the visual field searchstep shown in FIG. 7 or the image confirmation step shown in FIG. 8, theoperation program 31 is executed to set a “visual field search mode”that is a display mode for increasing a scan speed of the electron beamin order to improve a response of the image. Meanwhile, since ahigh-definition image is required at an image storage step, theoperation program 31 is executed to lower the scan speed and sets an“image confirmation mode” for displaying a high-definition image. Ascreen D41 in the operation panel screen 204 shows in which display modethe image C41 is currently displayed. In FIG. 7, the display mode is setto the “visual field search mode”.

By the operation program 31 appropriately switching the display modeaccording to the operation step as described above, reduction in workefficiency or mistakes due to a failure to perform the operation can beprevented.

Moreover, by displaying a message regarding switching of the displaymode on the operation navigation screen 201, the user can recognize whatkind of processing is performed by the operation program 31.

Note that preset buttons D43 (Preset 1) and D44 (Preset 2) on a screenD42 in the operation panel screen 204 shown in FIG. 7 are buttons forsetting the magnification to a preset magnification that ispre-registered. A preset registration button D45 is a button forregistering a new preset magnification.

Note that the application assist screen 202 displays a message regardingcriteria for pressing an autobrightness button and an autofocus button.

After making a series of adjustments, the user displays the operationscreen 200 shown in FIG. 8 by pressing a “Next” button A41 displayed onthe operation navigation screen 201.

FIG. 8 is a diagram showing contents displayed in autoadjustment shownin FIG. 7.

In FIG. 8, the operation navigation screen 201 shows that the currentstep is “Autoadjustment” of “3. Image Confirmation”.

Note that the various buttons displayed on the operation panel screen204 are not changed from those shown in FIG. 7. However, an image C51 onthe image display screen 203 is subjected to magnification adjustmentand is displayed at a magnification higher than that in FIG. 7.

Here, the user presses an “autobrightness” button D51 in the operationpanel screen 204 to adjust the brightness and contrast.

Note that, in FIG. 8, the screen D41 in the operation panel screen 204shows that the display mode is the “visual field search mode” at theprevious operation step.

When the user presses the “autobrightness” button D51, autoadjustment ofthe brightness (adjustment to default brightness) is performed.

(S104)

Next, FIGS. 9 to 14 are diagrams each showing an example of theoperation screen during image saving (capturing) (S104).

FIG. 9 is a diagram showing contents displayed immediately after theautoadjustment is completed.

The operation navigation screen 201 displays a message indicating that“3. Image Confirmation” is finished and the operation step has proceededto “Image Saving” of the next “4. Image Capture”. Also, a messageprompting saving of the image is displayed on a screen A61. Moreover,the screen D41 is changed from “Visual Field Search” to “ImageConfirmation”. Other than the above, the various buttons displayed onthe operation panel screen 204 are the same as those shown in FIGS. 7and 8.

As described with reference to FIG. 7, the operation program 31 isexecuted to switch the display mode of the image C51 according to theoperation step. However, in the “Image Saving” step shown in FIG. 9, theoperation program 31 is executed to set the display mode to an “imageconfirmation” mode (reference numeral D61 on the screen D41 in theoperation panel screen 204) for obtaining a high-definition image.

Also, a screen B61 on the application assist screen 202 displays amessage indicating that the display mode is switched to the “imageconfirmation” mode.

In this event, the application assist screen 202 may display a messageindicating what characteristics are to be highlighted for capturingunder an observation condition in autoadjustment.

Here, when the user presses a “Specify Destination to Save” button D62highlighted in the operation panel screen 204, display-contents shown inFIG. 10 are displayed.

Note that, here, the autoadjustment is finished just by the userperforming the autobrightness adjustment. However, by pressing an“autofocus” button D63 at the operation step shown in FIG. 8 or FIG. 9,the user may perform autofocus for adjusting the focus to a focus valuedetermined to be optimum by a person who has performed the parametersetting.

FIG. 10 is a diagram showing contents displayed at a step of setting thelocation to save.

When the user presses the “Specify Destination to Save” button D62 inthe operation panel screen 204 shown in FIG. 9, the operation program 31is executed to render the operation screen 200 inactive as shown in FIG.10, and to display a location setting screen 302 in front of theoperation screen 200.

Since the location setting screen 302 is the same as a general locationsetting screen, detailed description thereof is omitted. When the usersets the location to save on the location setting screen 302 and pressesa registration button E71, the operation program 31 is executed todisplay display-contents shown in FIG. 11 on the image display device18.

FIGS. 11 and 12 are diagrams showing contents displayed at the imagesaving step.

FIGS. 11 and 12 show the operation screen 200 for saving the displayedimage C51 in the storage device 21.

A screen A81 in the operation navigation screen 201 displays a messageprompting pressing of an image save button to save the image.

Also, a screen B81 in the application assist screen 202 displays amessage prompting confirmation of the image on a large screen bypressing a full-screen display button before capturing. As describedabove, the operation program 31 can be executed to display advicecorresponding to the operation step on the application assist screen202. Such display can be provided if screen information for each of theoperation steps is stored in the storage device 21 and the operationprogram 31 is executed to display the screen for each of the operationsteps.

In FIG. 11, the image CM displayed on the image display screen 203 andthe various buttons in the operation panel screen 204 are the same asthose shown in FIG. 9, except that a “Save Image” button D81 ishighlighted in the operation panel screen 204.

Here, when the user presses a full-screen button C81, an image C91 withincreased magnification and the like is displayed as shown in FIG. 12.Since other screens 201 (FIG. 11), 202 (FIG. 11) and 204 in theoperation screen 200 shown in FIG. 12 are the same as those shown inFIG. 11, description thereof is omitted.

Accordingly, the user can confirm the image in an enlarged state. Notethat the user may confirm and save the image with the size of the imagedisplayed in FIG. 11 and the like. After the confirmation of the image,the user presses the “Save Image” button D81 in the operation panelscreen 204.

Note that, in this event, the application assist screen 202 may displaypoints of the image confirmation.

FIGS. 13 and 14 are diagrams showing the operation screen 200 during theimage saving.

Although the contents displayed on the operation navigation screen 201and the operation panel screen 204 are the same as those shown in FIGS.11 and 12, nothing is displayed on the application assist screen 202.

Also, an image C101 displayed in the image display screen 203 appearsgradually from the top according to saved pixels.

Moreover, as shown in FIG. 14, an image saving information screen 303 isdisplayed in front of the operation screen 200. The image savinginformation screen 303 displays image saving conditions and influencesof the conditions. Furthermore, a progress level of image savingprocessing is displayed by a progress bar E111.

Note that, during a waiting time for the image saving processing, theoperation program 31 may be executed to display information onanticipated defects and problems on the application assist screen 202(FIG. 13). As such information, for example, possible defects orproblems in the image under the current capturing conditions (here, theparameters for standard observation and magnification during imagesaving) may be displayed.

Alternatively, a learning screen may be displayed together with theimage saving information screen 303, the learning screen showing theprinciples of the electron microscope 101, explanation of pretreatmentof the specimen 9, the structure of the electron microscope 101, theoperation procedure of the electron microscope 101, the principles ofhighlighted images in capturing, and the like. Furthermore, a learningscreen may be displayed together with the image saving informationscreen 303, the learning screen showing explanation of items in thescreens 201 to 204 such as the application assist screen 202 in theoperation screen 200, explanation of various adjustment parameters ofthe electron microscope 101, and the like. Thus, improvement in thelearning effect on the user can be expected.

(S105 and S106)

Next, FIGS. 15 to 19 are diagrams showing examples of the operationscreen during confirmation of whether or not the current image is OK bythe user (S105) and during adjustment and change of the observationcondition by the user (S106).

FIG. 15 is a diagram showing contents displayed after the image issaved.

First, the operation navigation screen 201 shows that the currentoperation step is “Image Saving” of “4. Image Capture”.

A screen A121 in the operation navigation screen 201 displays a continuebutton A122 and an end button A123. When the user is not satisfied withthe current image, the continue button A122 to continue the observationis pressed, and the operation program 31 continues the processing (S105:No).

When the user is satisfied with the current image, the end button A123to end the observation is pressed, and the operation program 31 isexecuted to terminate the processing (S105: Yes).

The image display screen 203 displays an observation history C121together with the image C51 under the current observation condition. Theimages saved thus far (the observation history C121) are displayedtogether with information (file names and observation condition) whichthe user wishes to set or check. For example, in FIG. 15, the imagepreviously saved is displayed as the observation history C121. When theuser presses the observation history C121, the image is enlarged.

Alternatively, when the user touches the image displayed in theobservation history C121 with a mouse, detailed observation conditionand the like for the image may be displayed.

Although buttons and the like corresponding to the current operationstep are displayed in the operation panel screen 204, descriptionthereof is omitted here.

An assist screen B121 is displayed in the application assist screen 202.The assist screen B121 is a screen displayed with capturing as atrigger. The assist screen B121 displays assist buttons B122 (B122 a andB122 b) describing advice to the user and the state of the image C51.Note that the assist screen B121 is a screen displayed in principleevery time the image is saved.

Here, the assist buttons B122 (B122 a and B122 b) may be displayed onlywhen the user determines that there is something in the image C51 he/sheis concerned about, rather than being always displayed in theapplication assist screen 202.

Alternatively, an unillustrated display button on the application assistscreen 202 may be displayed in a predetermined spot in the operationscreen 200, and display and non-display of the application assist screen202 may be switched by the user pressing the display button.

Here, the operation program 31 may be executed to display informationabout the current observation condition on the image display device 18.

The observation condition is a combination of various parameter settingsof the electron microscope 101 during the irradiation of the primaryelectron beam 2 as described above. To be more specific, the observationcondition includes accelerating voltage, current, working distance,magnification and the like. Such an observation condition includesvalues that can be acquired before capturing of the specimen 9. Notethat the working distance means a distance between a lower surface ofthe objective lens and the specimen.

The image quality of the image means values of luminance distribution,sharpness and the like. The image quality of the image includes valuesthat can be acquired from the captured image after the capturing.

The information about the operation steps includes the contentsdisplayed on the operation panel screen 204, operation time in eachoperation step, operation histories and the like. The information aboutthe operation steps is information used when performing processing ofhiding the assist buttons B122 for the operation once performed.

Specifically, the information about the assist buttons B122 is stored inthe storage device 21 so as to correspond to the image quality of theimage and to the observation condition which is the combination of theparameter setting values of the electron microscope 101.

As described above, by the operation program 31 selecting and displayingthe assist buttons B122 based on the information about the observationcondition, the image quality of the image and the operation steps, theuser can easily see what kind of problem is currently occurring.

The computer 19 analyzes the image quality of the image C51. Then, basedon the image quality of the image as a result of the analysis and thecurrent observation condition, the operation program 31 is executed toacquire, from the storage device 21, information about the assistbuttons B122 corresponding to the result of the analysis. Furthermore,the operation program 31 is executed to display the acquired informationabout the assist buttons B122 in a predetermined spot (here, theapplication assist screen 202) on the operation screen 200 as the assistbuttons B122.

Here, the computer 19 may be implemented to display the assist buttonsB122 that may realize improvement in image quality examined by amanufacturer, based on the current observation condition, withoutanalyzing the image quality of the image C51. In other words, thecomputer 19 may set the assist buttons B122 to be previously displayedby the manufacturer.

The contents displayed in the assist buttons B122 include the following,besides the contents shown in FIG. 15.

(a) The unevenness or three-dimensional appearance of the image isimpaired compared with during the visual field search (scan speed:high). As a reason for such a problem, charge-up or the like isconceivable.

(b) The image is deformed compared with during the visual field search(scan speed: high). As a reason for such a problem, charge-up, damage tothe specimen or the like is conceivable.

The novice user is often satisfied with an image that is actually not anoptimum image, since he/she does not know an image obtained under theoptimum observation condition. By displaying the assist buttons B122 asin this embodiment, frequently arising problems with the image arepresented, and the user can notice such problems.

In the example shown in FIG. 15, as a result of the analysis on theimage C51 by the operation program 31, the distribution is biased towardthe high luminance side in the luminance distribution. Therefore, theoperation program 31 is executed to display the assist button B122indicated by reference numeral B122 a. Moreover, as a result of theanalysis on the image C51 by the operation program 31, the sharpnessvalue is low. Therefore, the operation program 31 is executed to displaythe assist button B122 indicated by reference numeral B122 b. Note thatthe operation program 31 stores, in the storage device 21, the assistbuttons B122 corresponding to the combinations of the observationconditions, the image quality of the image and the operation steps. Theoperation program 31 is executed to display the assist buttons B122 onthe application assist screen 202 by selecting the assist buttons B122according to the information on the observation conditions, the imagequality of the image and the operation steps.

Note that, as shown in FIG. 15, the operation program 31 may beconfigured to display a highlighted image B123, in which the problemdescribed in each assist button B122 is highlighted, by highlighting theobservation condition. For example, the operation program 31 is executedto display, on the assist button B122 a, the highlighted image B123having the luminance distribution extremely biased toward the highluminance side. Similarly, the operation program 31 is executed todisplay, on the assist button B122 b, the highlighted image B123 havingextremely lowered sharpness.

The highlighted image B123 may be an image obtained by simulation underan extreme observation condition. Alternatively, an image may beprepared by performing such simulation beforehand. Here, the simulationis performed under extreme conditions such that problems displayed onthe assist buttons B122 occur.

Here, when the user presses the assist button B122 a, the operationprogram 31 is executed to display display-contents shown in FIG. 16.

FIG. 16 is a diagram showing contents displayed during target change.

The user determines that the entire image is glaring and has white lines(bright lines) by looking at the image C51 shown in FIG. 15, and pressesthe assist button B122 a. Then, in order to solve the problem describedin the assist button B122 a, the operation program 31 is executed todisplay, on the application assist screen 202, a solution screen B131prompting to change the observation target to “observation with emphasison surface structure”. Similarly, in order to change the observationtarget, the operation program 31 is executed to display a messageprompting to press a “change” button D131 on a screen A131 in theoperation navigation screen 201. Here, the user is prompted to press the“change” button D131 rather than automatically shifting to the nextscreen by the operation program 31. Accordingly, the user can recognizethe position of the “change” button D131, and thus the learning effecton the user can be improved.

Moreover, screen information associated with the assist buttons B122shown in FIG. 15 is pre-stored in the storage device 21. When the screeninformation corresponding to the pressed assist button B122 is selected,the operation program 31 is executed to display the screens A131 andB131 shown in FIG. 16.

Note that the operation navigation screen 201 shown in FIG. 16 showsthat the current step is “Target Change” of “1. Preparation”.

The operation program 31 is executed to display the operation panelscreen 204 according to the operation navigation screen 201. On theoperation panel screen 204, the “change” button D131 is highlighted toprompt the user to change the observation target.

When the user presses the “change” button D131 according to the contentsdescribed in the screen A131, the operation program 31 is executed todisplay the display-contents shown in FIG. 17 on the image displaydevice 18.

Here, the solution screen B131 prompting to change the observationtarget to “observation with emphasis on surface structure” or themessage prompting to press the “change” button D131 may be displayed inanother window. For example, this another window displays some possiblesolutions to the problem described in the assist button B122. For eachof items of such solutions, an unillustrated “search” button may bedisposed. When the “search” button is pressed by the user, necessaryinformation about the solutions may be displayed. Through such anoperation, the user can acquire knowledge about the operation of theelectron microscope 101. Moreover, a “solve” button is disposed for eachof the items of the solutions, and pressing the button starts navigationto implement the solutions. In this process, a message prompting topress the “change” button D131 may be displayed on the screen A131 inthe operation navigation screen 201.

The parameter setting values set by the user when operating the electronmicroscope 101 include accelerating voltage, working distance,excitation of condenser lens, pore size of objective movable diaphragm,degree of vacuum, detection signal and the like. However, it isdifficult for the user to know what kind of image is obtained by settingwhat values as the parameter setting values. Moreover, the user hasvarious observation targets, such as wishing to observe while maximizingthe resolution, wishing to observe the surface and wishing to observethe material distribution. However, most novice users use the parametersetting values without knowing there are optimum parameter settingvalues according to the observation target. Moreover, most novice usersconduct observation using the currently set parameter setting valueswithout changing the parameter setting values even when the observationtarget is changed. However, such usage cannot fully derive theperformance of the apparatus.

Therefore, in this embodiment, rather than the user setting theparameter setting values, optimum parameter setting values areautomatically set according to the observation target (observationtarget change) selected by the user. Note that options of theobservation target are the observation conditions often used by the useror wished to be used by the user. It is preferable that the number ofconditions that can be recognized and selected by even a novice user isabout five, including analysis. In this embodiment, “standardobservation”, “observation with emphasis on surface structure”,“observation with emphasis on surface structure and materialdistribution”, “observation with emphasis on material distribution” and“observation with elemental analysis” are set as the observationtargets.

When there are six or more options, it is difficult for the novice userto recognize a difference between acquired images and to select anappropriate observation target. Note that the parameter setting valuesto be used differ between high-vacuum observation and low-vacuumobservation. Thus, the five observation targets resulting in a cleardifference in image are provided for both of the high-vacuum observationand low-vacuum observation.

Note that the number of the observation targets to be set may vary withthe number of detectors 10 (FIG. 1), such as a secondary electrondetector, a BSE (Back Scattered Electron) detector and an EDX (EnergyDispersive X-ray) device, or the kind of the detector 10 included.

FIG. 17 is a diagram showing contents displayed when the observationtarget is changed.

When the “change” button D131 shown in FIG. 16 is pressed, theobservation target change screen 304 is displayed in front of theoperation screen 200 as shown in FIG. 17. Here, since the configurationof the operation screen 200 is the same as that shown in FIG. 16,description thereof is omitted.

An observation target setting button E141 is displayed in theobservation target change screen 304. In the observation target settingbutton E141, candidates of observation target change are described.

Moreover, on the left side of the observation target change screen 304,a legend E145 a of a radar chart and a schematic diagram E145 b of asimulated specimen for the highlighted image E142 are displayed. Thelegend E145 a of the radar chart indicates legends of a radar chart(observation condition characteristic indicator) E144 displayed in eachobservation target setting button E141.

As shown in the legend E145 a of the radar chart, the characteristics ofthe image are defined to have three axes, “suitable for highmagnification”, “emphasis on surface structure” and “emphasis onmaterial difference”. Each of the axes is represented using athree-point scale. The more toward the outside of the radar chart E144,the more significant the characteristics on each axis. When each of theaxes is represented using a scale of four points or more, a more preciseradar chart is realized.

“Suitable for high magnification” in the legend E145 a of the radarchart indicates a degree of a high-resolution observation condition. Forexample, when the user conducts an observation at a magnification ofseveral tens of thousands or more, the sharper the image, the moreoutward the item of “suitable for high magnification” in the radar chartE144 is marked. The parameter setting values for the electron microscope101 include accelerating voltage, working distance, excitation ofcondenser lens, pore size of objective movable diaphragm, degree ofvacuum, detection signal and the like. In addition to those parametersetting values, conditions for observation at high magnification includeincreasing the accelerating voltage, increasing the excitation of thecondenser lens, reducing the pore size of the objective movablediaphragm, reducing the working distance, increasing the degree ofvacuum, and using secondary electrons as the detection signal.

“Emphasis on surface structure” in the legend E145 a of the radar chartindicates a degree of conditions for enabling observation in threedimensions by emphasizing an uneven structure on the specimen surface.The observation condition for emphasizing the uneven structure on thespecimen surface mainly includes lowering the accelerating voltage andusing secondary electrons as the detection signal.

“Emphasis on material difference” in the legend E145 a of the radarchart indicates a degree of conditions for emphasizing materialdifference in a specimen having different materials mixed therein. Theobservation condition for emphasizing the material difference mainlyincludes using backscattered electrons as the detection signal. As tothe backscattered electrons, an element having the larger atomic numberhas higher reflectivity. Thus, generation of many signals leads to abrighter image. The material difference can be represented by adifference in contrast.

As described above, “suitable for high magnification”, “emphasis onsurface structure” and “emphasis on material difference” areincompatible parameter setting values. Therefore, for a certainobservation target, it is generally not the case that all the parametersetting values in the radar chart E144 have the highest scores. Morespecifically, if a certain parameter setting value is good, the otherparameter setting values become relatively poor. Therefore, by showingthe characteristics of the observation target with the radar chart as inthis embodiment, the characteristics (advantages and disadvantages) ofthe observation target can be visually easily recognized.

Note that four, five or more axes may be provided in the radar chart byadding items such as “charge-up reduction (suppression)” and “beamdamage reduction (suppression)”.

“Charge-up reduction (suppression)” indicates an observation conditionunder which charge-up can be reduced by narrowing the primary electronbeam 2 (FIG. 1) and thus reducing irradiation current. The observationcondition for reducing (suppressing) the charge-up mainly includelowering the accelerating voltage, increasing the excitation of thecondenser lens, using the backscattered electrons as the detectionsignal, and lowering the degree of vacuum. As an image acquisitionmethod in this case, more than one image is acquired by quick scan andintegration is performed to form an image by overlapping the acquiredimages.

“Beam damage reduction (suppression)” indicates an observation conditionunder which beam damage to a heat-sensitive specimen can be reduced bynarrowing the primary electron beam 2 and reducing the irradiationcurrent. The observation condition for reducing (suppressing) the beamdamage mainly includes lowering the accelerating voltage and increasingthe excitation of the condenser lens.

Here, the observation condition characteristic indicator is not limitedto the radar chart. For example, the items of “suitable for highmagnification”, “emphasis on surface structure” and “emphasis onmaterial difference” may be expressed by using numbers such aspercentages, using graphs such as bar graphs, using words such as“good”, “moderate” and “bad”, or using symbols such as ⊚, ◯ and Δ.

The schematic diagram E145 b of the simulated specimen is a schematicdiagram of a simulated specimen obtained by combining materialsdifferent in shape and quality. The schematic diagram allowscharacteristics of an observation target image to be recognized at aglance in the highlighted image E142 to be described later. Althoughvarious factors are mixed in an observation image of an actual specimen,the display of the schematic diagram E145 b of the simulated specimenfacilitates understanding of the meaning of the highlighted image E142.

In the schematic diagram E145 b of the simulated specimen, for easierdifferentiation between shapes, three materials different in shape areused, i.e., a columnar material A and a prismatic material B are placedon a material C that is a substrate. Here, the material A may have ahemispherical shape rather than the columnar shape. Also, the material Bmay have a square truncated pyramid shape rather than the prismaticshape. Moreover, a substrate surface of the material C may haveunevenness, rather than being flat and smooth, so that an unevenstructure can be observed in an observation with emphasis on the surfacestructure.

As to the material quality, when backscattered electrons are used as thedetection signal, the three materials have different elements so as toclarify a difference in black and white contrast, and two of theelements are a light element and a heavy element. Specifically, in thisembodiment, it is assumed that the material A is gold that is a heavyelement, the material B is aluminum, and the material C is carbon or thelike that is a light element. Thus, on the observation target settingbutton E141 in “observation with emphasis on material distribution”, ahighlighted image E142 can be displayed, in which the materials aredisplayed in “black”, “intermediate color, i.e., gray” and “white”,respectively. Note that, also as for display colors of materials in theschematic diagram E145 b of the simulated specimen, materials A, B and Cmay be displayed in gold, gray and black, respectively, or the like, sothat the elements can be easily recognized.

On the observation target change screen 304, five observation targetsetting buttons E141 are arranged from top to bottom, i.e., “standardobservation”, “observation with emphasis on surface structure”,“observation with emphasis on surface structure and materialdistribution”, “observation with emphasis on material distribution” and“observation with elemental analysis” are arranged in this order fromtop. Note that, although FIG. 17 shows the observation target ofhigh-vacuum observation as an example, the same goes for the observationtarget of low-vacuum observation. Up to five observation targets arearranged from top to bottom.

The top observation target “standard observation” is a defaultobservation target and has an observation condition under which anuneven structure on the specimen surface can be obtained with sharpnesseven at a high magnification, which is the basis of SEM (ScanningElectron Microscope) observation. In other words, the “standardobservation” has conditions under which even a novice user who does notknow what conditions are suitable for a conductive specimen can easilyobtain satisfactory data without hesitation. Through an experience ofeasy capturing by using such an observation condition, the novice userbecomes highly motivated to use the apparatus, leading to an expectationthat more aspirations are cultivated in the user. The observationcondition under which an uneven structure on the specimen surface can beobtained with sharpness even at a high magnification is a condition thatallows high resolution. By using such an observation condition, the usercan relatively easily acquire an image of high magnification, e.g., ahundred-thousand-fold image with no regard to the magnification.Specific parameter setting values are as follows, for example: theaccelerating voltage is 15 kV, the working distance is 5 mm, excitationof the condenser lens is strong, the pore size of the objective movablediaphragm is small, the degree of vacuum is high and secondary electronsare used as the detection signal. Here, important parameter settingvalues are the accelerating voltage and the detection signal.Theoretically, the higher the accelerating voltage, the higher theresolution.

The secondary electrons have weak energy of several eV and can begenerated only from about 10 nm from the specimen surface. Thus, byusing the secondary electrons as the detection signal, an image on whichthe uneven structure on the surface is more reflected can be obtained. Ascanning electron microscope can normally perform observation with anaccelerating voltage of up to 30 kV. However, if the acceleratingvoltage is too high, the primary electron beam 2 enters too deep into anactual specimen. As a result, internal information is mixed in thesecondary electrons emitted by the irradiation of the electron beam.Therefore, it becomes difficult to obtain an image on which the unevenstructure on the specimen surface is reflected. For this reason, in theradar chart E144 of “standard observation” for detecting the secondaryelectrons at the accelerating voltage of 15 kV, “suitable for highmagnification” by the observation at the accelerating voltage of 15 kVranks in the highest level. Meanwhile, “emphasis on surface structure”ranks in the lowest level since the accelerating voltage is 15 kV, and“emphasis on material difference” ranks in the lowest level since thesecondary electrons are used as the detection signal. Note that, when afour-point scale radar chart is used, for example, “suitable for highmagnification” ranks in the highest level, “emphasis on surfacestructure” ranks in the second level from bottom, and “emphasis onmaterial difference” ranks in the lowest level.

The second top observation target “observation with emphasis on surfacestructure” has an observation condition under which minute unevenness onthe specimen surface, which is difficult to observe in “standardobservation”, can be displayed more in three dimensions. Specificparameter setting values are as follows, for example: the acceleratingvoltage is 5 kV, the working distance is 5 mm, excitation of thecondenser lens is strong, the pore size of the objective movablediaphragm is small, the degree of vacuum is high and secondary electronsare used as the detection signal. “Observation with emphasis on surfacestructure” is different from “standard observation” in that theaccelerating voltage is changed from 15 kV to 5 kV. When theaccelerating voltage is changed from 15 kV to 5 kV, the resolution isreduced and the magnification to obtain a sharp image is set to about50000 times. Therefore, “suitable for high magnification” in the radarchart E144 (legend E145 a) is lowered compared with “standardobservation” and comes in the lowest level.

Moreover, since the primary electron beam 2 enters less deeply into thespecimen, an image with more emphasis on the uneven structure on thespecimen surface is obtained. In this event, “emphasis on surfacestructure” comes in the highest level in the radar chart E144 in“observation with emphasis on surface structure”. Meanwhile, “emphasison material difference” stays in the lowest level since the detectionsignal is the same. Note that, when a four-point scale radar chart isused, for example, “suitable for high magnification” comes in the secondlevel from bottom, “emphasis on surface structure” comes in the highestlevel, and “emphasis on material difference” comes in the lowest level.Moreover, only for this observation target, a method in which charge-upis less likely to occur is set. For example, integration or the like isused to form an image by overlapping images acquired by quick scan.

The observation target “observation with emphasis on surface structureand material distribution” in the third place from top has anobservation condition under which, although the resolution is reducedcompared with the image obtained in “observation with emphasis onmaterial distribution”, material difference can be displayed by contrastin brightness/darkness or the like. Moreover, “observation with emphasison surface structure and material distribution” has an observationcondition under which minute unevenness on the specimen surface can bedisplayed more in three dimensions. Specific parameter setting valuesare as follows, for example: the accelerating voltage is 5 kV, theworking distance is 5 mm, excitation of the condenser lens isintermediate, the pore size of the objective movable diaphragm is small,the degree of vacuum is high and backscattered electrons are used as thedetection signal. “Observation with emphasis on surface structure andmaterial distribution” is different from “standard observation” in thatthe accelerating voltage is changed from 15 kV to 5 kV, thebackscattered electrons are used as the detection signal, and theexcitation of the condenser lens is slightly reduced. By changing theaccelerating voltage from 15 kV to 5 kV, an image with more emphasis onthe uneven structure on the specimen surface is obtained even though theresolution is reduced.

The observation using the backscattered electrons enables a materialdifference to be expressed by a difference in contrast. Thus, “suitablefor high magnification” comes in the lowest level in the radar chartE144 for “observation with emphasis on surface structure and materialdistribution”. Meanwhile, “emphasis on surface structure” comes in thesecond level from top, which is lower than the case using the secondelectrons but is relatively high, and “emphasis on material difference”comes in the highest level. Note that, when a four-point scale radarchart is used, for example, “suitable for high magnification” comes inthe second level from bottom, “emphasis on surface structure” comes inthe second level from top, and “emphasis on material difference” comesin the highest level.

The observation target “observation with emphasis on materialdistribution” in the fourth place from top has an observation conditionunder which material difference can be displayed by contrast inbrightness/darkness or the like, in a specimen made of differentmaterials, such as a composite material and a foreign material. Specificparameter setting values are as follows, for example: the acceleratingvoltage is 15 kV, the working distance is 5 mm, excitation of thecondenser lens is intermediate, the pore size of the objective movablediaphragm is small, the degree of vacuum is high and backscatteredelectrons are used as the detection signal. “Observation with emphasison material distribution” is different from “standard observation” inthat the backscattered electrons are used as the detection signal, theexcitation of the condenser lens is slightly reduced to increase theirradiation current. The backscattered electrons are characterized inthat the material difference can be expressed by a difference incontrast. The heavier the material is, the higher the reflectivity is.Since more signals are generated, the images become brighter.Accordingly, the material difference can be displayed by the contrast inbrightness/darkness or the like.

Since the backscattered electrons have approximately the same energy asthat of incident electrons, backscattered electrons generated inside thespecimen are also detected. For this reason, internal information ismixed compared with the secondary electrons, leading to poor resolution.Therefore, in the radar chart E144 for “observation with emphasis onmaterial distribution”, “suitable for high magnification” comes in thesecond highest level, which is lower than “standard observation”.Meanwhile, “emphasis on surface structure” comes in the lowest level,and “emphasis on material difference” comes in the highest level. Notethat, when a four-point scale radar chart is used, for example,“suitable for high magnification” comes in the second level from top,“emphasis on surface structure” comes in the lowest level, and “emphasison material difference” comes in the highest level.

The observation target “observation with elemental analysis” at thebottom has an observation condition for conducting EDX analysis byincreasing the size of the primary electron beam 2 and increasing theirradiation current. In “observation with elemental analysis”, materialdifference can be displayed by the contrast in brightness/darkness orthe like or the like. The elemental analysis can be conducted byperforming operations on the EDX device side after searching for a spotfor EDX analysis and adjusting focus and the like under the observationcondition described above. Specific parameter setting values are asfollows, for example: the accelerating voltage is 15 kV, the workingdistance is 10 mm, excitation of the condenser lens is weak, the poresize of the objective movable diaphragm is small, the degree of vacuumis high and backscattered electrons are used as the detection signal.“Observation with elemental analysis” is different from “standardobservation” in that the excitation of the condenser lens is reduced tobe very weak and the irradiation current is increased, in order toincrease the count of X-rays to be generated from the specimen.Moreover, since the elemental analysis is performed by reflectingmaterial difference, the backscattered electrons are used as thedetection signal, and the working distance is changed to 10 mm toefficiently receive X-rays generated from the specimen. However, thesecondary electrons may be used as the detection signal in such a caseas where no backscattered electron detector is mounted. Although FIG. 17shows only spectrum display, a radar chart E144 or a highlighted imageE142 may be displayed as in the case of the other observation targets.In the case of displaying a radar chart, although a radar chart E144 issimilar to that for “observation with emphasis on materialdistribution”, “suitable for high magnification” is slightly loweredcompared with “observation with emphasis on material distribution”.

When a four-point scale radar chart is used, for example, “suitable forhigh magnification” comes in the second level from bottom, “emphasis onsurface structure” comes in the lowest level, and “emphasis on materialdifference” comes in the highest level.

Note that buttons for displaying detailed observation conditions areprovided for five observation target setting buttons E141, respectively.When any of these buttons is pressed, characteristics and specificparameter setting values of the corresponding observation target aredisplayed. The parameter setting values in this case include theaccelerating voltage, working distance, condenser lens (spot intensity),objective movable diaphragm, detection signal, degree of vacuum, imageretrieval method and the like. This can meet the needs of the user toknow specific parameter setting values of the observation condition.

Such information of the observation target setting buttons E141 ispre-stored in the storage device 21 in association with the assistbuttons B122 shown in FIG. 15. The operation program 31 is executed toselect the observation target setting button E141 corresponding to thepressed assist button B122, and displays the selected button on theimage display device 18.

Note that the operation program 31 may be configured to refer to anoperation history and hide a predetermined observation target settingbutton E141 (e.g., the observation target setting button E141 oncepressed) based on the operation history.

When the user presses one of the observation target setting buttonsE141, the pressed observation target setting button E141 is displayedinverted (reference numeral E141 a). Then, the operation program 31 isexecuted to set the observation condition according to the contentsdescribed in the pressed observation target setting button E141. In theexample of reference numeral E141 a, the observation condition of“emphasis on surface structure” are set. Note that the observationtarget setting button E141 to be displayed may vary with the state ofthe specimen 9, such as “coating” and “non-coating”. The state of thespecimen 9 is inputted by the user in the step shown in FIG. 4, forexample.

The operation program 31 is executed to set the observation condition byreferring to an observation condition setting table 41 (FIG. 18) storedin the storage device 21.

Note that, in the operation step shown in FIG. 17, the observationtarget change screen 304 may display information about the specimen 9,such as “coating” and “non-coating”, and the like.

Moreover, as shown in FIG. 17, the operation program 31 may be executedto display explanation tabs E143 for “coated specimen/ high vacuum mode”and “uncoated specimen/low vacuum mode” on the observation target changescreen 304. For example, when the user selects the explanation tab E143a for “uncoated specimen/low vacuum mode”, the operation program 31 isexecuted to display information on explanation of an uncoated specimen,explanation of a specimen that is preferably not coated, advantages anddisadvantages of not performing coating, explanation of a method forsetting a low-vacuum mode, and the like on the observation target changescreen 304.

Furthermore, as shown in FIG. 17, parameter setting values under theobservation condition corresponding to the observation target settingbutton E141 may be displayed in a radar chart E144 within theobservation target setting button E141. In this way, the user can easilyconfirm the characteristics of the observation condition in each of theobservation target setting buttons E141. Moreover, in this embodiment, aradar chart E144 for another observation target setting button E141 canalso be viewed in the same screen, as shown in FIG. 17. In this way,each of the observation targets can be easily compared visually, and thecharacteristics (advantages and disadvantages) of each observationtarget can be easily grasped visually. As a result, even a novice usercan easily select an appropriate observation target. Moreover, in thisembodiment, by pressing the target select button E142, the legend E145 aof the radar chart is also changed, as shown in FIG. 17. In FIG. 17,since the observation target setting button for “observation withemphasis on surface structure and material distribution” are set, thelegend E145 a of the radar chart also indicates the characteristics of“observation with emphasis on surface structure and materialdistribution”. If another observation target setting button E141 is set,the display of the legend E145 a of the radar chart is also switched.Thus, the user can visually and easily recognize a change incharacteristics of the observation condition with a change inobservation target.

FIG. 18 is a diagram showing the observation condition setting tableaccording to this embodiment.

Each record in the observation condition setting table 41 shown in FIG.18 corresponds to each of the observation target setting buttons E141,and is the combination of parameter setting values (acceleratingvoltage, detection signal and Scan method) for each observation target.As shown in FIG. 18, observation targets such as“unevenness/small/visibility”, “unevenness/large/visibility” and“composition information/visibility” are evaluated using ⊚, ∘, Δ, × andthe like in the observation condition setting table 41. Note that theevaluation method is not limited to ⊚, ∘, Δ, × as shown in FIG. 18, butscores and the like may be used for evaluation. The observation targetsetting buttons E141 (FIG. 17) are associated with the observationtargets based on the evaluation. Here, as described above, theobservation condition is the combination of parameter setting values,and the observation target is the influence of the observation conditionon images, such as visibility of unevenness.

Here, while eleven observation targets are set in FIG. 18, there arefive observation target setting buttons E141 in FIG. 17. A person whosets the observation target may set the observation target settingbuttons E141 by selecting five observation targets suitable for a noviceuser among the observation targets set in FIG. 18.

When any of the observation target setting buttons E141 shown in FIG. 17is pressed, the operation program 31 is executed to set observationcondition using the parameter setting values in the record in theobservation condition setting table 41 corresponding to the pressedobservation target setting button E141. For example, the operationprogram 31 is executed to set observation condition using the parametersetting values in the record No. 1 with good visibility of smallunevenness and large unevenness. The individual values in theobservation condition setting table 41 shown in FIG. 18 are thosepreviously adjusted so that a minimum-level image can be taken. Notethat the parameter setting values in the observation condition settingtable 41 include current, working distance, magnification and the like,besides accelerating voltage, detection signal and Scan method. Here, inFIG. 18, SE (Secondary Electron) represents secondary electrons and BSErepresents backscattered electrons. Note that each record in theobservation condition setting table 41 is associated with each of theobservation target setting buttons E141 based on predeterminedcorrespondence information (identification information and the like).The identification information includes No in FIG. 18 and the like, forexample.

One of the records in the observation condition setting table 41 is setas a default observation condition. Thus, an observation conditioncorresponding to an adjustment image can be set without operation by theuser. More specifically, the user can substantially perform capturingonly by automatic operation, and can always easily obtain an image of acertain level. Thus, even a novice user can easily perform capturing.Through an experience of easy capturing, the novice user becomes highlymotivated to use the apparatus, leading to cultivation of moreaspirations in the user.

Moreover, a highlighted image E142 is displayed in the observationtarget setting button E141.

The highlighted image E142 is an image in which comparison with astandard image that can be observed under the default observationcondition “standard observation” is highlighted, and is also an image onwhich parameters shown in the radar chart are reflected.

The highlighted image E142 associated with the observation targetsetting button E141 is pre-stored in the storage device 21. In selectingor displaying the observation target setting button E141, the operationprogram 31 is executed to acquire or display the highlighted image E142associated with the observation target setting button E141, therebydisplaying the highlighted image E142.

By displaying the highlighted image E142 as described above, the usercan visually recognize what kind of effect can be achieved by selectingthe corresponding observation target setting button E141. In PatentDocuments 1 and 2, since the user compares raw images, it is difficultfor a novice user to recognize a difference in image caused by adifference between observation conditions. Meanwhile, by displaying thehighlighted image E142 as in this embodiment, even a novice user caneasily recognize the effect of selecting the observation target settingbutton E141.

Here, as a highlighted image E142 a, a standard image is displayed so asto show that the observation performed is standard observation. In ahighlighted image E142 b, shades are emphasized so as to highlight thesurface structure. In a highlighted image E142 c, shades are emphasizedso as to show a difference between the surface structure and materialdistribution, and different colors and the like are assigned torespective materials. In a highlighted image E142 d, different colorsand the like are assigned to respective materials so as to show adifference in material distribution. A highlighted image E142 e is agraphic image so as to represent elemental analysis.

Note that, as described above, a radar chart E144 and a highlightedimage E142 may be displayed in “observation with elemental analysis” asin the case of the other observation targets. For example, a graphicdisplay (spectrum display) that represents elemental analysis may beoverlapped with a highlighted image of a simulated specimen, which issimilar to those for the other observation targets.

In the highlighted image E142, the state of an image that is taken forthe corresponding observation target (observation condition) isemphasized most. To be more specific, as the highlighted image E142, animage in which the state of the image is visually emphasized or deformedis used. As shown in FIG. 17, it is preferable and effective to use, asthe highlighted image E142, a symbolic block, such as a cuboid and acolumn, or a simplified graph.

Note that the highlighted images E142 described above are an example,and any other highlighted image may be displayed. Moreover, thehighlighted image E142 may be displayed near the observation targetsetting button E141 rather than on the observation target setting buttonE141 as shown in FIG. 17.

Moreover, the operation program 31 may be configured to displayinformation such as “after capturing” on the observation target settingbutton E141, for which capturing has already been performed, byreferring to the operation history. Thus, the user can easily select theobservation target for which capturing is yet to be performed.

FIG. 19 is a diagram showing contents displayed immediately after theobservation target setting button E141 a shown in FIG. 17 is pressed.

When the observation target setting button E141 a is pressed, a messageprompting to press an “enter” button E153 is displayed on a screen A151in the operation navigation screen 201.

Then, a special setting button E151 may be displayed on the observationtarget change screen 304 displayed in front of the operation screen 200.

In the example shown in FIG. 19, the special setting button E151 isdisplayed. The special setting button E151 is a button for a settingthat is not essential but special (special setting).

When the user presses the special setting button E151, the operationprogram 31 is executed to refer to the storage device 21. Then, theoperation program 31 is executed to acquire special setting informationassociated with the special setting button E151. The operation program31 is also executed to display the acquired special setting informationin a special information display region E152 on the observation targetchange screen 304.

In the special information display region E152, information about thespecial setting is displayed. In the example shown in FIG. 19, contentsregarding coating are displayed as the special setting. In the exampleshown in FIG. 19, there is a description on the special setting buttonE151 that setting for coating can be performed. When the user pressesthe special setting button E151, the operation program 31 is executed todisplay, in the special information display region E152, informationabout advantages and disadvantages in observation when coating isperformed, about the specimen 9 suitable for coating, and the like.Furthermore, the operation program 31 may be executed to display, in thespecial information display region E152, a method for observing anuncoated specimen 9 (more specifically, an operation procedure to selectthe degree of vacuum for shift to the low-vacuum observation) and thelike. Moreover, together with the information about coating, informationabout a coating method, such as ion plating and vacuum deposition, maybe displayed.

As described above, by displaying the special setting button E151 andthe special information display region E152, the user can noticeobservation in special setting.

The special setting button E151 may be displayed in every observationtarget change screen 304. Alternatively, when a specific observationtarget setting button E141 (FIG. 17) is pressed, the operation program31 may be executed to display the special setting button E151 stored inthe storage device 21 in association with the observation target settingbutton E141.

Then, when the user presses the “enter” button E153 on the observationtarget change screen 304 in accordance with the message displayed in thescreen A151 on the operation navigation screen 201, the operationprogram 31 is executed to refer to the observation condition settingtable 41. Subsequently, the operation program 31 is executed to set, inthe circuits 11 to 17 (FIG. 1), parameter setting values of a recordcorresponding to the pressed observation target setting button E141 asan observation condition.

Note that the operation program 31 is executed to store the operationhistory thus far in the storage device 21 as needed.

In the following FIGS. 20 to 37, as to the same operation screen 200 asthose shown in FIGS. 4 to 19, detailed description thereof is omitted asappropriate, and only differences from FIGS. 4 to 19 are described.

FIG. 20 is a diagram showing contents displayed immediately after the“enter” button E153 is pressed in FIG. 19. Note that, when the userpresses the “enter” button E153 in FIG. 19, the operation program 31 isexecuted to return the processing again back to the visual field searchand magnification adjustment (S103 in FIG. 2), and the computer 19acquires an image under the selected observation target (observationcondition).

Since FIG. 20 has the same screen configuration as that shown in FIG. 7,description of each screen configuration is omitted. FIG. 20 isdifferent from FIG. 7 in that the image C51 displayed in the imagedisplay screen 203 stays the same as that shown in FIG. 16 and in thatthe observation history C121 is displayed in the image display screen203.

In FIG. 20, the user performs the magnification adjustment and visualfield search in the same manner as FIG. 7.

Here, when the user sets a magnification that cannot be set (amagnification not less than or not more than a predeterminedmagnification), the operation program 31 may is executed to display awarning on the image display device 18.

Along with the changed observation target, the “current observationtarget” display button D51 is changed from “standard observation” thusfar (FIG. 7) to “observation with emphasis on surface structure” in theoperation panel screen 204.

FIG. 21 is a diagram showing contents displayed immediately after themagnification adjustment and visual field search are performed in FIG.20.

FIG. 21 shows a state where the magnification is increased (e.g., by20000 times) as a result of the magnification adjustment and visualfield search in FIG. 20.

The operation screen 200 shown in FIG. 21 is the same as that shown inFIG. 20 except that an image C171 in the increased magnification stateis displayed in the image display screen 203 and that a “manualadjustment” button D171 is displayed in the operation panel screen 204.

Here, the “manual adjustment” is to manually, rather than automatically,adjust brightness, contrast, focus and the like as described later.

When the “manual adjustment” button D171 is pressed, a manual brightnessadjustment button, a manual contrast adjustment button, a focus button(e.g., reference numeral C223 in FIG. 27), a focus X button (e.g.,reference numeral C251 in FIG. 29), a focus Y button (e.g., referencenumeral C271 in FIG. 31) and the like are displayed. The “manualadjustment” button D171, the focus button, the focus X button and thefocus Y button are buttons that can be displayed when the magnificationbecomes a predetermined magnification or more, and thus cannot bedisplayed when the magnification is not more than the predeterminedmagnification. Note that, when the “manual adjustment” button D171 ispressed, all of the manual brightness adjustment button, manual contrastadjustment button, focus button, focus X button, focus Y button may bedisplayed if the magnification is not less than the predeterminedmagnification. On the other hand, all of those buttons may be hidden ifthe magnification is less than the predetermined magnification.

Here, the “manual adjustment” button D171 is displayed when themagnification is not less than the predetermined magnification.Meanwhile, image shift may be adopted as means for moving the visualfield if the magnification is not less than the predeterminedmagnification. On the other hand, stage movement is adopted as the meansfor moving the visual field if the magnification is not more than thepredetermined magnification.

As described above, by setting specific operation items based onpredetermined conditions, unnecessary operations can be prevented toreduce errors.

Note that a magnification adjustment range may be limited according tothe observation target. In such a case, i.e., when a desiredmagnification cannot be obtained for the current observation target, theuser may change the observation target by pressing the observationtarget change button D172 on the operation panel screen 204.

FIG. 22 is a diagram showing contents displayed in autoadjustment.

FIG. 22 is basically the same as FIG. 8 except that the image C171 withincreased magnification, the observation history C121 and the “manualadjustment” button D171 (FIG. 21) are displayed in the image displayscreen 203, and thus description thereof is omitted.

(S104)

FIG. 23 is a diagram showing the operation screen during image re-saving(capturing) (S104) by the user after the autoadjustment is completed.

FIG. 23 is basically the same as FIG. 9 except that the image C171 withincreased magnification, the observation history C121 and the “manualadjustment” button D171 (FIG. 21) are displayed in the image displayscreen 203, and thus description thereof is omitted.

By performing the same processing as that shown in FIGS. 10 to 14, animage obtained under the current observation condition is stored in thestorage device 21.

(S105 and S106)

Next, FIGS. 24 to 34 are diagrams showing examples of the operationscreen during reconfirmation of whether or not the current image is OKby the user (S105) and during readjustment and re-change of theobservation condition by the user (S106).

FIG. 24 is a diagram showing contents displayed after the image issaved.

FIG. 24 shows the image C171 with increased magnification in the imagedisplay screen 203 and an observation history C201 with new addition ofthe image saved in FIG. 23. Note that, although the image C171 withincreased magnification is displayed in FIG. 23, the image is then savedafter restoring the magnification to the original magnification.

Moreover, the assist button B122 a in the application assist screen 202shown in FIG. 15 is not displayed, and a new assist button B122 c (B122)is displayed instead.

Since FIG. 24 is basically the same as FIG. 15 except for thosedescribed above, description thereof is omitted.

Note that the processing performed by the operation program 31 indisplaying the assist buttons B122 b and B122 c is the same as thatdescribed with reference to FIG. 15, and thus description thereof isomitted here.

At this point, when the user is satisfied with the image, theobservation is terminated by the user pressing the end button A123 inthe operation navigation screen 201.

As the contents displayed by the assist button B122 c, the unevenness orthree-dimensional appearance of the image is impaired compared withduring the visual field search (scan speed: high) or the image isdeformed compared with during the visual field search (operation speed:high) as described above.

Note that, although the above problems do not occur in alow-magnification situation, such problems may be caused by increaseddensity of the irradiation beam (primary electron beam 2) or the like ina high-magnification situation.

The reason why the assist button B122 a (FIG. 15) is not displayed andthe new assist button B122 c is displayed instead in the applicationassist screen 202 is that the operation program 31 is executed to hidethe processing item (here, the assist button B122 a) once performed byreferring to the operation history stored in the storage device 21 asneeded.

Moreover, the operation program 31 is executed to display the new assistbutton B122 c by analyzing the current image C171. Note that thisprocessing is the same as that shown in FIG. 15.

Here, the user presses the continue button A122 and further presses theassist button B122 b.

FIG. 25 is a diagram showing contents displayed in target change.

The user determines that the image is somewhat blurred by looking at theimage C171 shown in FIG. 24, and presses the assist button B122 b. Then,the operation program 31 is executed to display a screen B211 in theapplication assist screen 202 as shown in FIG. 25, in order to solve theproblem described in the assist button B122 b. The screen B211 displaysa message prompting focus adjustment in a manual adjustment mode.Moreover, a screen A211 in the operation navigation screen 201 alsosimilarly displays a message prompting manual focus adjustment bypressing a “manual adjustment” button D211.

Since the processing performed by the operation program 31 to displaysuch screens A211 and B211 is the same as that described with referenceto FIG. 16, description thereof is omitted.

When the user presses the “manual adjustment” button D211 highlighted inthe operation panel screen 204, the operation program 31 is executed todisplay the display-contents shown in FIG. 26 on the image displaydevice 18.

Note that, in FIGS. 25 to 33, sub-items of the main item “imageconfirmation” on the operation navigation screen 201 are different fromthose shown in FIG. 8 and the like, and sub-items for manual adjustmentare displayed.

FIGS. 26 to 28 are diagrams showing contents displayed for focusadjustment in the manual adjustment screen.

In FIG. 26, a manual adjustment button group C222 is displayed near animage C221 in the image display screen 203 (next to an image displayregion C224 in the example shown in FIG. 26). Here, the image C221corresponds to the center portion of the image C171 shown in FIG. 24 andthe like. The reason why only the center portion (a part) of the imageC171 is displayed in the image C221 is because of the following reason.In order to ensure the image quality and following capability requiredfor adjustment of the focus and the like, the operation program 31 isexecuted to reduce the image C171 to an observation portion such as theimage C221, thereby reducing time required when scanning is repeatedwhile improving the image quality at a low scan speed (hereinafter, thesame goes for FIGS. 27 to 33).

Note that, in FIGS. 26 to 33, images C221 and C231 are reduced anddisplayed. However, the present invention is not limited thereto, butthe images may be displayed to fit the window.

Then, the operation navigation screen 201 displays informationindicating that the current operation step is “Focus Adjustment” of “3.Image Confirmation”. Moreover, the screen A221 in the operationnavigation screen 201 displays a message prompting to press the focusbutton C223.

Furthermore, the screen B221 in the application assist screen 202displays a message indicating that the display mode is switched to an“image adjustment” mode. Note that the screen D41 in the operation panelscreen 204 also displays that he current display mode is the “imageadjustment” mode. Since the processing performed by the operationprogram 31 to switch the display mode is described with reference toFIG. 7, description thereof is omitted here.

When the user points the mouse cursor to the focus button C223 accordingto the instructions of the screen A221 or the screen B221, the focusbutton C223 is highlighted as shown in FIG. 26, and the image C221 (FIG.26) is changed to the image C231 (FIG. 27).

Then, when the user presses the focus button C223, the focus button C223is displayed inverted as shown in FIG. 27, and a focus slider C232 forfocus adjustment is displayed.

The user determines whether or not stigma adjustment is required bymoving the focus slider C232.

Thereafter, as the user moves the focus slider C232, the computer 19causes the X-direction stigmator control circuit 13 and the Y-directionstigmator control circuit 14 to control the X-direction stigmator 4 andthe Y-direction stigmator 5 according to a movement distance of thefocus slider C232 inputted through the input device 23.

The image C231 shows a state where the focus of the image C221 (FIG. 26)is shifted by the user moving the focus slider C232.

Here, a screen A231 in the operation navigation screen 201 shown in FIG.27 displays a measure of focus adjustment. Moreover, in a referenceimage A232 in the screen A231, an estimated change in image when thefocus slider C232 is moved is deformed and displayed.

Then, when the user confirms that the image is enlarged (stretched) onlyin a predetermined direction by moving the focus slider C232, the userpresses a “stretch” button A233 in the screen S231. Note that, if theimage is not stretched even when the focus slider S232 is moved, theuser presses a “no stretch” button A234 in the screen A231. When the “nostretch” button A234 is pressed, the operation program 31 is executed todisplay display-contents shown in FIG. 34 on the image display device 18without performing focus X adjustment and focus Y adjustment shown inFIGS. 28 to 33.

Note that the focus X adjustment in FIG. 27 is stigma adjustment in an Xdirection, and the focus Y adjustment is stigma adjustment in a Ydirection.

Then, the operation program 31 is executed to display display-contentsshown in FIG. 28 on the image display device 18.

Note that the screen A231 may be displayed in the application assistscreen 202. Also, the reference image A232 may be a still image or amoving image.

The operation screen 200 shown in FIG. 28 is the same as that shown inFIG. 27 except that a screen A241 is displayed in the operationnavigation screen 201.

The screen A241 displays a message prompting the user to perform focusadjustment by moving the focus slider C232.

The user points the focus slider C232 to a position where the image C231is not stretched by moving the focus slider C232, and then presses a“next” button A242 in the operation navigation screen 201.

Then, the operation program 31 is executed to finish the focusadjustment processing and to display display-contents for focus Xadjustment on the image display device 18.

FIGS. 29 and 30 are diagrams showing the display-contents for the focusX adjustment in the manual adjustment screen.

In the focus X adjustment, first, a screen A251 for the operationnavigation screen 201 displays a message prompting to press the focus Xbutton C251 as shown in FIG. 29.

Also, a screen B251 in the application assist screen 202 displays amessage to the effect that the image may not be sharpened only by focusX adjustment. Such display allows the user to proceed with the operationpatiently even if he/she cannot obtain a sharp image after the focus Xadjustment.

When the user points the mouse cursor to the focus X button C251displayed near the image C221 (next to the image display region C224 inthe example shown in FIG. 29) according to the message displayed in thescreen A251, the focus X button C251 is highlighted as shown in FIG. 29.

Then, when the user presses the highlighted focus X button C251, thefocus X button C251 is displayed inverted as shown in FIG. 30, and afocus X slider C261 is displayed.

Moreover, as shown in FIG. 30, a screen A261 in the operation navigationscreen 201 displays a message prompting to sharpen the image by movingthe focus X slider C261.

Note that the screen A261 displays an image A262 in which an effect ofmoving the focus X slider C261 is highlighted.

The user moves the focus X slider C261 according to the messagedisplayed in the screen A261. Then, the computer 19 causes theX-direction stigmator control circuit 13 to control the X-directionstigmator 4 according to a movement distance of the focus X slider C261inputted through the input device 23.

Thereafter, the user presses a “next” button A263 when he/she thinksthat the image is roughly sharpened. Then, the operation program 31 isexecuted to finish the focus X adjustment and moves on to the next focusY adjustment.

FIGS. 31 and 32 are diagrams showing display-contents for the focus Yadjustment in the manual adjustment screen.

In the focus Y adjustment, a screen A271 in the operation navigationscreen 201 displays a message prompting to press a focus Y button C271as shown in FIG. 31.

Also, a screen B271 in the application assist screen 202 displays amessage to the effect that a change in the image can be more easily seenby movement with large amplitude during the focus Y adjustment. Suchdisplay can prompt the user to try to move with large amplitude in thefocus Y adjustment.

When the user points the mouse cursor to the focus Y button C271displayed near the image C221 (next to the image display region C224 inthe example shown in FIG. 31) according to the message displayed in thescreen A271, the focus Y button C271 is highlighted as shown in FIG. 31.

Then, when the user presses the highlighted focus Y button C271, thefocus Y button C271 is displayed inverted as shown in FIG. 32, and afocus Y slider C281 is displayed.

Moreover, as shown in FIG. 32, a screen A281 in the operation navigationscreen 201 displays a message prompting to sharpen the image by movingthe focus Y slider C281.

Note that the screen A281 displays an image A282 in which an effect ofmoving the focus Y slider C281 is highlighted.

The user moves the focus Y slider C281 according to the messagedisplayed in the screen A281. Then, the computer 19 causes theY-direction stigmator control circuit 14 to control the Y-directionstigmator 5 according to a movement distance of the focus Y slider C281inputted through the input device 23.

Thereafter, the user presses a “next” button A283 when he/she thinksthat the image is roughly sharpened. Then, the operation program 31 isexecuted to finish the focus Y adjustment and display display-contentsfor the next slider adjustment screen on the image display device 18.

As described above, the user can perform the focus adjustment using thefocus slider C232 (FIG. 27), the focus X slider C261 (FIG. 30), thefocus Y slider C281 (FIG. 32) and the like displayed near the imagesC221 (FIG. 26 and the like) and C231 (FIG. 27 and the like). In thisway, the user can easily make adjustments while looking at the imagesC221 and C231. Moreover, when the plurality of images C221 and C231 aredisplayed, the focus slider C232, the focus X slider C261, the focus Yslider C281 and the like may be displayed for each of the images C221and C231. In this way, the user can easily make adjustments for each ofthe images C221 and C231.

FIG. 33 is a diagram showing display-contents for focus confirmation inthe manual adjustment screen.

FIG. 33 has the same configuration as that shown in FIG. 26 except for ascreen A291 in the operation navigation screen 201 (however, the displaymode is set to “visual field search mode”).

The screen A291 in the operation navigation screen 201 displays amessage prompting to confirm whether or not the focus adjustment is made(also whether or not focus adjustment is required) in the same manner asFIG. 27.

The user performs the focus adjustment in the same manner as FIGS. 26 to28, and confirms whether or not focus readjustment is required.

As a result, when it is determined by the user that the focusreadjustment is required, the user presses an “adjust” button A292 toperform the focus adjustment by executing the processing shown in FIGS.29 to 32 again.

On the other hand, when it is determined by the user that the focusreadjustment is not required, the user presses a “next” button A293, andthe operation program 31 is executed to finish the manual adjustmentprocessing and displays display-contents for autoadjustment shown inFIG. 34 on the image display device 18. To be more specific, theoperation program 31 is executed to display a brightness autoadjustmentscreen shown in FIG. 34 on the image display device 18.

Note that the operation screens 200 corresponding to the manualadjustment steps are preset in the storage device 21, and the operationprogram 31 is executed to display the operation screen 200 correspondingto the current step on the image display device 18. Thus, the operationscreens 200 shown in FIGS. 26 to 33 are displayed.

FIG. 34 is a diagram showing display-contents in autoadjustment.

FIG. 34 shows the operation screen 200 for the user to automaticallyadjust the brightness of the image. Since the operation screen is thesame as that shown in FIG. 22 except for an observation history C201having two images registered therein, description thereof is omitted.

Here, the user performs autoadjustment on the image subjected to thefocus adjustment by manual adjustment in FIGS. 26 to 33.

Note that the same operation screens 200 as those shown in FIGS. 20 and21 may be displayed before the operation screen 200 shown in FIG. 34,and the user may perform the visual field search and magnificationadjustment.

(S104)

FIG. 35 is a diagram showing the operation screen during image re-saving(capturing) (S104) by the user after the autoadjustment is completed.

FIG. 35 is the same as FIG. 23 except that the observation history C201having two images registered therein is displayed, and thus descriptionthereof is omitted.

By performing the same processing as that shown in FIGS. 10 to 14, animage subjected to the focus adjustment by autoadjustment is stored inthe storage device 21.

(S105 and S106)

FIG. 36 is a diagram showing an example of the operation screen duringreconfirmation of whether or not the current image is OK by the user(S105) and during readjustment and re-change of the observationcondition by the user (S106).

FIG. 36 shows an observation history C321 with new addition of the imagesaved in FIG. 35. Note that, although the image with increasedmagnification is displayed in FIG. 35, the image is then saved afterrestoring the magnification to the original magnification.

Moreover, by the operation program 31 executed to refer to theprocessing history, the assist button B122 b in the application assistscreen 202 shown in FIG. 24 is not displayed, and a new assist buttonB122 d (B122) is displayed instead.

Since FIG. 36 is the same as FIG. 24 except for those described above,description thereof is omitted.

Moreover, since the processing performed by the operation program 31 todisplay the assist buttons B122 c and B122 d is the same as thatdescribed with reference to FIG. 15, description thereof is omittedhere.

As the contents displayed by the assist buttons B122 c and B122 d, theunevenness or three-dimensional appearance of the image is impairedcompared with during the visual field search (scan speed: high) or theimage is deformed compared with during the visual field search(operation speed: high) as described above.

Moreover, although the above problems do not occur in alow-magnification situation, such problems may be caused by increaseddensity of the irradiation beam (primary electron beam 2) or the like ina high-magnification situation.

At this point, when the user is satisfied with the image, theobservation is terminated by the user pressing the end button A123 inthe operation navigation screen 201.

On the other hand, when the user is not satisfied with the image, thecontinue button A122 in the operation navigation screen 201 is pressed.

By repeating the processing described above until the end button A123 ispressed, the user can obtain a good-quality image while learning theprocedure.

(S106)

FIG. 37 shows a modified example of the application assist screenaccording to this embodiment. FIG. 37 shows a screen in “adjustment andchange” in Step S106.

In FIG. 37, a solution screen 305 is displayed in front of the operationscreen 200 shown in FIG. 15. When the user presses the assist buttonB122, the operation program 31 is executed to display the solutionscreen 305 corresponding to the pressed assist button B122.Specifically, the solution screen 305 corresponding to each assistbutton B122 is stored in the storage device 21. When the assist buttonB122 is pressed, the operation program 31 is executed to acquire thesolution screen 305 corresponding to the pressed assist button B122 fromthe storage device 21. Then, the operation program 31 is executed todisplay the acquired solution screen 305 on the image display device 18.

In the solution screen 305, solutions to the problems described in theassist button B122 are displayed in list form according to thedifficulty of operations. Here, the solution is, more specifically, tochange the observation target to an appropriate observation target. Sucha list can be realized by storing the difficulty of each solution in thestorage device 21.

When a detail button E331 in the solution screen 305 is pressed, theprinciples of the corresponding solution and the like are displayed.Then, when an execution button E332 is pressed, an operation screen 200to change the observation target to an appropriate observation target isdisplayed.

A solution in an inexecutable region E333 indicates that the user cannotexecute the solution. This notifies the user that the user cannotexecute such solutions since he/she is a novice user. Note that, asdescribed above, the operation screen 200 according to this embodimentis based on the assumption that the user is a novice user. In this way,the user can realize that there are solutions that he/she cannot executeunless he/she is an advanced user.

Moreover, by displaying the observation targets in list form as in thesolution screen 305, the user can easily confirm the operations he/shehas performed thus far as well as operations yet to be performed.

Note that, when the image displayed in the image display screen 203 isdisplayed at high magnification (e.g., 20000 times or more), the manualadjustment button group C222 (or at least one of those in the group)shown in FIG. 26 may be hidden.

Furthermore, the manual adjustment button group C222 may be displayedonly when the current magnification is a predetermined magnification ormore. As described above, by displaying/hiding the operation items(buttons) or setting specific operation items based on predeterminedconditions, unnecessary operations can be prevented to reduce errors.

It takes time or almost impossible to take an appropriate image whileselecting innumerable parameter setting combinations through trial anderror. Since it is very difficult and takes time especially for a noviceuser to perform such an operation, the user ends up giving up on takinga good image. Furthermore, the user loses sight of how to obtain anappropriate image. Such a vicious cycle is created when a novice useroperates the electron microscope 101.

According to this embodiment, an image is first acquired under a defaultobservation condition, and then the direction for adjustment on theacquired image can be laid out. Thus, the user can efficiently obtain atarget image even if he/she is a novice user, and a learning effect onthe user can be expected.

Moreover, in the observation condition characteristic indicator (radarchart), the characteristics of the observation conditions are visuallyrepresented by contrasting axes such as “suitable for highmagnification”, “emphasis on surface structure” and “emphasis onmaterial difference”. With the use of such a radar chart, even a noviceuser can select an optimum observation target.

Furthermore, a result obtained by changing the observation target to anappropriate target is displayed as a schematic highlighted image such asthe highlighted image E142 shown in FIG. 17. Thus, even a novice usercan easily grasp an image of what kind of result can be obtained bychanging the observation target.

According to this embodiment, the operation program 31 is executed tofirst acquire an image under a default observation condition. Then, onthe application assist screen 202, the operation program 31 is executedto display advice on the acquired image to the user. Thereafter, theoperation program 31 is executed to change the observation condition andsaves an image on which the change in observation condition isreflected. Subsequently, the operation program 31 is executed to displayadvice again to the user on the application assist screen 202 regardingthe image obtained as a result of reflecting the change in observationcondition, and then saves an image on which the change in observationcondition is reflected. By repeating these operations, the novice usercan set the observation condition for acquiring a target image and canobtain characteristics of the image captured under the set observationcondition. Thus, skills of the user can be improved.

Note that this embodiment is based on the assumption of the use of ascanning electron microscope (particularly a general-purpose operationelectron microscope). However, the present invention is not limitedthereto but may be applied to a charged particle beam apparatus such asa transmission electron microscope and an ion microscope.

Moreover, although a first image is acquired under a default observationcondition in this embodiment, the operation program 31 may be executedto acquire a first image with a configuration set by the user and thusthe user may adjust the observation condition according to a message onthe application assist screen 202 or the like. In this way, the user cancompare the observation condition that he/she has in mind with theobservation condition to obtain a desired image.

Note that the operation navigation screen 201 can be hidden depending onthe skills of the user. In such a case, all the buttons to be used aredisplayed on the operation panel screen 204.

Alternatively, a term dictionary may be stored in the storage device 21and, when the user clicks on a specific mark, a dictionary mark or aphrase displayed in the operation screen 200, the operation program 31may be executed to display a description of the phrase on the imagedisplay device 18 by referring to the term dictionary.

Moreover, although the schematic highlighted image E142 is displayed onthe observation target setting button E141 shown in FIG. 17 in thisembodiment, the image B123 on the assist button B122 shown in FIG. 15,for example, may be used as a similar schematic highlighted image.

Furthermore, although this embodiment employs the configuration assumingthat the operations are performed by a novice user from the start, ascreen to select among a novice user, an intermediate user and anadvanced user may be displayed on the image display device 18 after theactivation in Step S101 shown in FIG. 2, for example. When the noviceuser is selected, the computer 19 may execute the processing accordingto this embodiment.

Note that the present invention is not limited to the embodimentdescribed above, but includes various modified examples. For example,the above embodiment has been described in detail to facilitate theunderstanding of the present invention, and is not necessarily limitedto one having all the configurations described above. Moreover, some ofthe configurations in the embodiment may be deleted or may be added withor replaced by other configurations.

Furthermore, some of or all of the configurations, functions, circuits11 to 17, image display device 18, storage device 21, operation program31 and the like described above may be realized by hardware by designingwith integrated circuits or the like, for example. Also, as shown inFIG. 1, the configurations, functions and the like described above maybe realized by software in such a manner that a processor such as a CPUinterprets and executes programs to realize all the functions. In such acase, information such as programs, tables and files to realize thefunctions may be stored in a memory, a recording device such as an SSD(Solid State Drive) or a recording medium such as an IC (IntegratedCircuit) card, an SD (Secure Digital) card and a DVD (Digital VersatileDisc), instead of being stored in the storage device 21 as shown in FIG.1.

Moreover, in the above embodiment, the description is given of controllines and information lines that are considered to be necessary for theillustrative purpose. Therefore, not all controls lines or informationlines required as a product are described. In fact, it is safe to assumethat almost all of the configurations are interconnected.

EXPLANATION OF REFERENCE NUMERALS

1 electron gun

2 primary electron beam

3 condenser lens

4 X-direction stigmator

5 Y-direction stigmator

6 upper deflector

7 lower deflector

8 objective lens

9 specimen

10 detector

11 high-voltage control circuit

12 condenser lens control circuit

13 X-direction stigmator control circuit

14 Y-direction stigmator control circuit

15 deflector control circuit

16 objective lens control circuit

17 detection signal control circuit

18 image display device

19 computer (processing unit)

21 storage device (storage unit)

22 memory

23 input device

31 operation program

41 observation condition setting table

100 electron microscope column (charged particle beam apparatus)

101 electron microscope (charged particle beam apparatus, chargedparticle beam apparatus system)

200 operation screen

201 operation navigation screen

202 application assist screen

203 image display screen (image display unit)

204 operation panel screen

304 observation target setting screen

B122, B122 a to B122 d assist button

B123 highlighted image

E141, E141 a observation target setting button

E143, E143 a to E143 d highlighted image

E144 radar chart (observation condition characteristic indicator)

What is claimed is:
 1. A charged particle beam apparatus comprising: aprocessor configured to control the charged particle beam apparatus toacquire information of a specimen by irradiating a primary electron beamon the specimen, the processor causing an image display device todisplay a schematic diagram showing a current irradiation status of theprimary electron beam.
 2. The charged particle beam apparatus accordingto claim 1, wherein the processor causes the image display device todisplay the schematic diagram showing the irradiation status of theprimary electron beam when irradiation of the primary electron beamstarts.
 3. The charged particle beam apparatus according to claim 1,wherein the processor causes the image display device to display theschematic diagram showing the irradiation status of the primary electronbeam and a screen showing a current operation status of the chargedparticle beam apparatus.
 4. The charged particle beam apparatusaccording to claim 2, wherein the processor causes the image displaydevice to display the schematic diagram showing the irradiation statusof the primary electron beam and a screen showing a current operationstatus of the charged particle beam apparatus.
 5. The charged particlebeam apparatus according to claim 1, wherein the processor causes theimage display device to display the schematic diagram showing theirradiation status of the primary electron beam and a screen showing acurrent progress condition.
 6. The charged particle beam apparatusaccording to claim 2, wherein the processor causes the image displaydevice to display the schematic diagram showing the irradiation statusof the primary electron beam and a screen showing a current progresscondition.
 7. The charged particle beam apparatus according to claim 1,wherein the processor causes the image display device to display theschematic diagram showing the irradiation status of the primary electronbeam and information of a parameter setting value for operating thecharged particle beam apparatus.
 8. The charged particle beam apparatusaccording to claim 2, wherein the processor causes the image displaydevice to display the schematic diagram showing the irradiation statusof the primary electron beam and information of a parameter settingvalue for operating the charged particle beam apparatus.
 9. The chargedparticle beam apparatus according to claim 1, wherein the image displaydevice after deactivating an operation screen being displayed displaysthe schematic diagram showing the irradiation status of the primaryelectron beam.
 10. The charged particle beam apparatus according toclaim 2, wherein the image display device after deactivating anoperation screen being displayed displays the schematic diagram showingthe irradiation status of the primary electron beam.
 11. The chargedparticle beam apparatus according to claim 3, wherein the image displaydevice after deactivating an operation screen being displayed displaysthe schematic diagram showing the irradiation status of the primaryelectron beam.
 12. The charged particle beam apparatus according toclaim 4, wherein the image display device after deactivating anoperation screen being displayed displays the schematic diagram showingthe irradiation status of the primary electron beam.
 13. The chargedparticle beam apparatus according to claim 5, wherein the image displaydevice after deactivating an operation screen being displayed displaysthe schematic diagram showing the irradiation status of the primaryelectron beam.
 14. The charged particle beam apparatus according toclaim 6, wherein the image display device after deactivating anoperation screen being displayed displays the schematic diagram showingthe irradiation status of the primary electron beam.
 15. The chargedparticle beam apparatus according to claim 7, wherein the image displaydevice after deactivating an operation screen being displayed displaysthe schematic diagram showing the irradiation status of the primaryelectron beam.
 16. The charged particle beam apparatus according toclaim 8, wherein the image display device after deactivating anoperation screen being displayed displays the schematic diagram showingthe irradiation status of the primary electron beam.
 17. A specimenobservation system comprising: a charged particle beam apparatus; animage display device; and a computer configured to control the chargedparticle beam apparatus and the image display device, the computercomprising a processor configured to control the charged particle beamapparatus to acquire information of a specimen by irradiating a primaryelectron beam on the specimen, and the processor causing the imagedisplay device to display a schematic diagram of a current irradiationstatus of the primary electron beam.
 18. A memory storing an operationprogram for operating a charged particle beam apparatus, the operationprogram causing a computer to control an image display device to displaya schematic diagram showing a current irradiation status of a primaryelectron beam when the computer controls the charged particle beamapparatus to acquire information of a specimen by irradiating theprimary electron beam on the specimen.